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Changhua, TW
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last 30 patents
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Patent Grant
Fluorine-free interface for semiconductor device performance gain
Patent number
11,908,909
Issue date
Feb 20, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Yu-Ting Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fluorine-free interface for semiconductor device performance gain
Patent number
11,437,477
Issue date
Sep 6, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Yu-Ting Tsai
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
FLUORINE-FREE INTERFACE FOR SEMICONDUCTOR DEVICE PERFORMANCE GAIN
Publication number
20240145561
Publication date
May 2, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Ting TSAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR CLEANING A PRE-CLEAN PROCESS CHAMBER
Publication number
20230017955
Publication date
Jan 19, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Ting Tsai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FLUORINE-FREE INTERFACE FOR SEMICONDUCTOR DEVICE PERFORMANCE GAIN
Publication number
20220384592
Publication date
Dec 1, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Ting TSAI
H01 - BASIC ELECTRIC ELEMENTS