HONG XIAO

Person

Pleasanton, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Overlay measurement targets design
- Patent number 11,914,290
- Issue date Feb 27, 2024
- KLA Corporation
- Hong Xiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defect inspection and review using transmissive current image of ch...
- Patent number 11,410,830
- Issue date Aug 9, 2022
- KLA Corporation
- Hong Xiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for generating programmed defects for use in metr...
- Patent number 10,768,533
- Issue date Sep 8, 2020
- KLA-Tencor Corporation
- Hong Xiao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Scan strategies to minimize charging effects and radiation damage o...
- Patent number 10,446,367
- Issue date Oct 15, 2019
- KLA-Tencor Corporation
- Hong Xiao
- G01 - MEASURING TESTING
Information Patent Grant
Allocating resources in multi-core computing environments
- Patent number 10,020,979
- Issue date Jul 10, 2018
- A10 Networks, Inc.
- Dennis Oshiba
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
System and method for cathodoluminescence-based semiconductor wafer...
- Patent number 10,018,579
- Issue date Jul 10, 2018
- KLA-Tencor Corporation
- Sameet K. Shriyan
- G01 - MEASURING TESTING
Information Patent Grant
High-speed hotspot or defect imaging with a charged particle beam s...
- Patent number 9,754,761
- Issue date Sep 5, 2017
- KLA-Tencor Corporation
- Hong Xiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for adaptively scanning a sample during electron...
- Patent number 9,734,987
- Issue date Aug 15, 2017
- KLA-Tencor Corporation
- Gary Fan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated decision-based energy-dispersive x-ray methodology and ap...
- Patent number 9,696,268
- Issue date Jul 4, 2017
- KLA-Tencor Corporation
- Harsh Sinha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced defect detection in electron beam inspection and review
- Patent number 9,449,788
- Issue date Sep 20, 2016
- KLA-Tencor Corporation
- Gary G. Fan
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for preparation of samples for sub-surface defe...
- Patent number 9,318,395
- Issue date Apr 19, 2016
- KLA-Tencor Corporation
- Cecelia Campochiaro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for measuring critical dimension and monitoring f...
- Patent number 9,282,293
- Issue date Mar 8, 2016
- Hermes Microvision Inc.
- Wei Fang
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Method and system for adaptively scanning a sample during electron...
- Patent number 9,257,260
- Issue date Feb 9, 2016
- KLA-Tencor Corporation
- Gary Fan
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for detecting buried defects
- Patent number 9,116,109
- Issue date Aug 25, 2015
- KLA-Tencor Corporation
- Hong Xiao
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for measuring critical dimension and monitoring f...
- Patent number 9,100,553
- Issue date Aug 4, 2015
- Hermes Microvision Inc.
- Wei Fang
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Method and system for measuring critical dimension and monitoring f...
- Patent number 9,041,795
- Issue date May 26, 2015
- Hermes Microvision Inc.
- Wei Fang
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Structure and method for determining a defect in integrated circuit...
- Patent number 9,035,674
- Issue date May 19, 2015
- Hermes Microvision, Inc.
- Hong Xiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming memory cell transistor
- Patent number 8,952,435
- Issue date Feb 10, 2015
- Hermes Microvision, Inc.
- Hong Xiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for inspecting overlay shift defect during semiconductor man...
- Patent number 8,923,601
- Issue date Dec 30, 2014
- Hermes Microvision Inc.
- Wei Fang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and apparatus for measurement of relative critical dimensions
- Patent number 8,884,223
- Issue date Nov 11, 2014
- KLA-Tencor Corporation
- Hong Xiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for heating substrate in vacuum environment and m...
- Patent number 8,809,779
- Issue date Aug 19, 2014
- Hermes-Microvision, Inc.
- Hong Xiao
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for forming memory cell transistor
- Patent number 8,778,763
- Issue date Jul 15, 2014
- Hermes Microvision, Inc.
- Hong Xiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for identifying plug-to-plug short from a char...
- Patent number 8,759,762
- Issue date Jun 24, 2014
- Hermes Microvision, Inc.
- Hong Xiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure and method for determining a defect in integrated circuit...
- Patent number 8,754,372
- Issue date Jun 17, 2014
- Hermes Microvision Inc.
- Hong Xiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure for inspecting defects in word line array fabricated by S...
- Patent number 8,748,814
- Issue date Jun 10, 2014
- Hermes Microvision Inc.
- Hong Xiao
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for detecting buried defects
- Patent number 8,723,115
- Issue date May 13, 2014
- KLA-Tencor Corporation
- Hong Xiao
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatus to review defects using scanning electron mic...
- Patent number 8,716,662
- Issue date May 6, 2014
- KLA-Tencor Corporation
- Paul MacDonald
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for measuring critical dimension and monitoring f...
- Patent number 8,432,441
- Issue date Apr 30, 2013
- Hermes Microvision Inc.
- Wei Fang
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Test structure for charged particle beam inspection and method for...
- Patent number 8,421,009
- Issue date Apr 16, 2013
- Hermes-Microvision, Inc.
- Hong Xiao
- G01 - MEASURING TESTING
Information Patent Grant
Test structure for charged particle beam inspection and method for...
- Patent number 8,299,463
- Issue date Oct 30, 2012
- Hermes-Microvision, Inc.
- Hong Xiao
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
OVERLAY MEASUREMENT TARGETS DESIGN
- Publication number 20210026238
- Publication date Jan 28, 2021
- KLA Corporation
- Hong XIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCAN STRATEGIES TO MINIMIZE CHARGING EFFECTS AND RADIATION DAMAGE O...
- Publication number 20190279841
- Publication date Sep 12, 2019
- KLA-Tencor Corporation
- Hong XIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System for Generating Programmed Defects for Use in Metr...
- Publication number 20180113387
- Publication date Apr 26, 2018
- KLA-Tencor Corporation
- Hong Xiao
- G01 - MEASURING TESTING
Information Patent Application
HIGH-SPEED HOTSPOT OR DEFECT IMAGING WITH A CHARGED PARTICLE BEAM S...
- Publication number 20160351373
- Publication date Dec 1, 2016
- KLA-Tencor Corporation
- Hong Xiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System for Adaptively Scanning a Sample During Electron...
- Publication number 20160155605
- Publication date Jun 2, 2016
- KLA-Tencor Corporation
- Gary Fan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATED DECISION-BASED ENERGY-DISPERSIVE X-RAY METHODOLOGY AND AP...
- Publication number 20160116425
- Publication date Apr 28, 2016
- KLA-Tencor Corporation
- Harsh SINHA
- G01 - MEASURING TESTING
Information Patent Application
ENHANCED DEFECT DETECTION IN ELECTRON BEAM INSPECTION AND REVIEW
- Publication number 20150090877
- Publication date Apr 2, 2015
- KLA-Tencor Corporation
- Gary G. FAN
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR DETECTING BURIED DEFECTS
- Publication number 20140319340
- Publication date Oct 30, 2014
- KLA-Tencor Corporation
- Hong XIAO
- G01 - MEASURING TESTING
Information Patent Application
Method and System for Adaptively Scanning a Sample During Electron...
- Publication number 20140319342
- Publication date Oct 30, 2014
- KLA-Tencor Corporation
- Gary Fan
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND APPARATUS FOR MEASUREMENT OF RELATIVE CRITICAL DIMENSIONS
- Publication number 20140151551
- Publication date Jun 5, 2014
- KLA-Tencor Corporation
- Hong XIAO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR DETECTING BURIED DEFECTS
- Publication number 20130256528
- Publication date Oct 3, 2013
- Hong XIAO
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR MEASURING CRITICAL DIMENSION AND MONITORING F...
- Publication number 20130202186
- Publication date Aug 8, 2013
- HERMES MICROVISION INC.
- WEI FANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND SYSTEM FOR MEASURING CRITICAL DIMENSION AND MONITORING F...
- Publication number 20130188037
- Publication date Jul 25, 2013
- HERMES MICROVISION INC.
- WEI FANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND SYSTEM FOR MEASURING CRITICAL DIMENSION AND MONITORING F...
- Publication number 20130182939
- Publication date Jul 18, 2013
- HERMES MICROVISION INC.
- WEI FANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEMS AND METHODS FOR PREPARATION OF SAMPLES FOR SUB-SURFACE DEFE...
- Publication number 20130137193
- Publication date May 30, 2013
- KLA-Tencor Corporation
- Cecelia CAMPOCHIARO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR MEASURING CRITICAL DIMENSION AND MONITORING F...
- Publication number 20120212601
- Publication date Aug 23, 2012
- HERMES MICROVISION INC.
- WEI FANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR FORMING MEMORY CELL TRANSISTOR
- Publication number 20120100705
- Publication date Apr 26, 2012
- Hermes Microvision, Inc.
- HONG XIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR REMOVING ORGANIC RESIDUE FROM A CHARGED PARTI...
- Publication number 20120080056
- Publication date Apr 5, 2012
- HERMES MICROVISION, INC.
- HONG XIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STRUCTURE AND METHOD FOR DETERMINING A DEFECT IN INTEGRATED CIRCUIT...
- Publication number 20120083055
- Publication date Apr 5, 2012
- Hermes-Microvision, Inc.
- Hong XIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STRUCTURE AND METHOD FOR DETERMINING A DEFECT IN INTEGRATED CIRCUIT...
- Publication number 20120074314
- Publication date Mar 29, 2012
- HERMES MICROVISION INC.
- HONG XIAO
- G01 - MEASURING TESTING
Information Patent Application
Method for Inspecting Overlay Shift Defect during Semiconductor Man...
- Publication number 20120070067
- Publication date Mar 22, 2012
- HERMES MICROVISION INC.
- WEI FANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR FORMING MEMORY CELL TRANSISTOR
- Publication number 20110049595
- Publication date Mar 3, 2011
- Hermes Microvision, Inc.
- HONG XIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEST STRUCTURE FOR CHARGED PARTICLE BEAM INSPECTION AND METHOD FOR...
- Publication number 20110013826
- Publication date Jan 20, 2011
- Hong Xiao
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR IDENTIFYING PLUG-TO-PLUG SHORT FROM A CHAR...
- Publication number 20100314539
- Publication date Dec 16, 2010
- Hermes Microvision, Inc.
- HONG XIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Inspecting Overlay Shift Defect during Semiconductor Man...
- Publication number 20100278416
- Publication date Nov 4, 2010
- Hong Xiao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TEST STRUCTURE FOR CHARGED PARTICLE BEAM INSPECTION AND METHOD FOR...
- Publication number 20100258720
- Publication date Oct 14, 2010
- Hong XIAO
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR HEATING SUBSTRATE IN VACUUM ENVIRONMENT AND M...
- Publication number 20100155596
- Publication date Jun 24, 2010
- Hermes-Microvision, Inc.
- HONG XIAO
- G01 - MEASURING TESTING
Information Patent Application
OPERATION STAGE FOR WAFER EDGE INSPECTION AND REVIEW
- Publication number 20100140498
- Publication date Jun 10, 2010
- HERMES-MICROVISION, INC.
- JACK JAU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEST STRUCTURE FOR CHARGED PARTICLE BEAM INSPECTION AND METHOD FOR...
- Publication number 20100102316
- Publication date Apr 29, 2010
- Hong Xiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Structure and Method for Determining a Defect in Integrated Circuit...
- Publication number 20100078554
- Publication date Apr 1, 2010
- Hermes-Microvision, Inc.
- Hong Xiao
- G01 - MEASURING TESTING

Person

Patents Grantslast 30 patents

Overlay measurement targets design

Defect inspection and review using transmissive current image of ch...

Method and system for generating programmed defects for use in metr...

Scan strategies to minimize charging effects and radiation damage o...

Allocating resources in multi-core computing environments

System and method for cathodoluminescence-based semiconductor wafer...

High-speed hotspot or defect imaging with a charged particle beam s...

Method and system for adaptively scanning a sample during electron...

Automated decision-based energy-dispersive x-ray methodology and ap...

Enhanced defect detection in electron beam inspection and review

Systems and methods for preparation of samples for sub-surface defe...

Method and system for measuring critical dimension and monitoring f...

Method and system for adaptively scanning a sample during electron...

Method and apparatus for detecting buried defects

Method and system for measuring critical dimension and monitoring f...

Method and system for measuring critical dimension and monitoring f...

Structure and method for determining a defect in integrated circuit...

Method for forming memory cell transistor

Method for inspecting overlay shift defect during semiconductor man...

Methods and apparatus for measurement of relative critical dimensions

Method and system for heating substrate in vacuum environment and m...

Method for forming memory cell transistor

Method and apparatus for identifying plug-to-plug short from a char...

Structure and method for determining a defect in integrated circuit...

Structure for inspecting defects in word line array fabricated by S...

Method and apparatus for detecting buried defects

Methods and apparatus to review defects using scanning electron mic...

Method and system for measuring critical dimension and monitoring f...

Test structure for charged particle beam inspection and method for...

Test structure for charged particle beam inspection and method for...

Patents Applicationslast 30 patents

OVERLAY MEASUREMENT TARGETS DESIGN

SCAN STRATEGIES TO MINIMIZE CHARGING EFFECTS AND RADIATION DAMAGE O...

Method and System for Generating Programmed Defects for Use in Metr...

HIGH-SPEED HOTSPOT OR DEFECT IMAGING WITH A CHARGED PARTICLE BEAM S...

Method and System for Adaptively Scanning a Sample During Electron...

AUTOMATED DECISION-BASED ENERGY-DISPERSIVE X-RAY METHODOLOGY AND AP...

ENHANCED DEFECT DETECTION IN ELECTRON BEAM INSPECTION AND REVIEW

METHOD AND APPARATUS FOR DETECTING BURIED DEFECTS

Method and System for Adaptively Scanning a Sample During Electron...

METHODS AND APPARATUS FOR MEASUREMENT OF RELATIVE CRITICAL DIMENSIONS

METHOD AND APPARATUS FOR DETECTING BURIED DEFECTS

METHOD AND SYSTEM FOR MEASURING CRITICAL DIMENSION AND MONITORING F...

METHOD AND SYSTEM FOR MEASURING CRITICAL DIMENSION AND MONITORING F...

METHOD AND SYSTEM FOR MEASURING CRITICAL DIMENSION AND MONITORING F...

SYSTEMS AND METHODS FOR PREPARATION OF SAMPLES FOR SUB-SURFACE DEFE...

METHOD AND SYSTEM FOR MEASURING CRITICAL DIMENSION AND MONITORING F...

METHOD FOR FORMING MEMORY CELL TRANSISTOR

SYSTEM AND METHOD FOR REMOVING ORGANIC RESIDUE FROM A CHARGED PARTI...

STRUCTURE AND METHOD FOR DETERMINING A DEFECT IN INTEGRATED CIRCUIT...

STRUCTURE AND METHOD FOR DETERMINING A DEFECT IN INTEGRATED CIRCUIT...

Method for Inspecting Overlay Shift Defect during Semiconductor Man...

METHOD FOR FORMING MEMORY CELL TRANSISTOR

TEST STRUCTURE FOR CHARGED PARTICLE BEAM INSPECTION AND METHOD FOR...

METHOD AND APPARATUS FOR IDENTIFYING PLUG-TO-PLUG SHORT FROM A CHAR...

Method for Inspecting Overlay Shift Defect during Semiconductor Man...

TEST STRUCTURE FOR CHARGED PARTICLE BEAM INSPECTION AND METHOD FOR...

METHOD AND SYSTEM FOR HEATING SUBSTRATE IN VACUUM ENVIRONMENT AND M...

OPERATION STAGE FOR WAFER EDGE INSPECTION AND REVIEW

TEST STRUCTURE FOR CHARGED PARTICLE BEAM INSPECTION AND METHOD FOR...

Structure and Method for Determining a Defect in Integrated Circuit...