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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for processing wafer-shaped articles
- Patent number 9,887,122
- Issue date Feb 6, 2018
- Lam Research AG
- Hongbo Si
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20170323823
- Publication date Nov 9, 2017
- LAM RESEARCH AG
- Hongbo SI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...