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Chandler, AZ, US
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Patents Grants
last 30 patents
Information
Patent Grant
High oxide film removal rate shallow trench (STI) chemical mechanic...
Patent number
12,091,581
Issue date
Sep 17, 2024
VERSUM MATERIALS US, LLC
Xiaobo Shi
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Chemical mechanical planarization composition for polishing oxide m...
Patent number
11,718,767
Issue date
Aug 8, 2023
VERSUM MATERIALS US, LLC
Ming-Shih Tsai
B24 - GRINDING POLISHING
Information
Patent Grant
Low oxide trench dishing chemical mechanical polishing
Patent number
11,692,110
Issue date
Jul 4, 2023
VERSUM MATERIALS US, LLC
Xiaobo Shi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Low oxide trench dishing chemical mechanical polishing
Patent number
11,667,839
Issue date
Jun 6, 2023
VERSUM MATERIALS US, LLC
Xiaobo Shi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Shallow trench isolation (STI) chemical mechanical planarization (C...
Patent number
11,608,451
Issue date
Mar 21, 2023
VERSUM MATERIALS US, LLC
Xiaobo Shi
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Oxide chemical mechanical planarization (CMP) polishing compositions
Patent number
11,549,034
Issue date
Jan 10, 2023
VERSUM MATERIALS US, LLC
Xiaobo Shi
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Shallow trench isolation (STI) chemical mechanical planarization (C...
Patent number
11,326,076
Issue date
May 10, 2022
VERSUM MATERIALS US, LLC
Xiaobo Shi
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Low oxide trench dishing shallow trench isolation chemical mechanic...
Patent number
11,254,839
Issue date
Feb 22, 2022
VERSUM MATERIALS US, LLC
Xiaobo Shi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Suppressing SiN removal rates and reducing oxide trench dishing for...
Patent number
11,180,678
Issue date
Nov 23, 2021
VERSUM MATERIALS US, LLC
Xiaobo Shi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemical mechanical planarization of films comprising elemental sil...
Patent number
11,111,415
Issue date
Sep 7, 2021
VERSUM MATERIALS US, LLC
James Matthew Henry
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metal compound chemically anchored colloidal particles and methods...
Patent number
11,104,825
Issue date
Aug 31, 2021
VERSUM MATERIALS US, LLC
Hongjun Zhou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Low oxide trench dishing chemical mechanical polishing
Patent number
11,078,417
Issue date
Aug 3, 2021
VERSUM MATERIALS US, LLC
Xiaobo Shi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Low oxide trench dishing chemical mechanical polishing
Patent number
11,072,726
Issue date
Jul 27, 2021
VERSUM MATERIALS US, LLC
Xiaobo Shi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemical mechanical planarization for tungsten-containing substrates
Patent number
11,066,575
Issue date
Jul 20, 2021
VERSUM MATERIALS US, LLC
Xiaobo Shi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Composite particles, method of refining and use thereof
Patent number
10,894,906
Issue date
Jan 19, 2021
VERSUM MATERIALS US, LLC
Hongjun Zhou
B24 - GRINDING POLISHING
Information
Patent Grant
Composite abrasive particles for chemical mechanical planarization...
Patent number
10,669,449
Issue date
Jun 2, 2020
VERSUM MATERIALS US, LLC
Hongjun Zhou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Composite particles, method of refining and use thereof
Patent number
10,421,890
Issue date
Sep 24, 2019
VERSUM MATERIALS US, LLC
Hongjun Zhou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Composite abrasive particles for chemical mechanical planarization...
Patent number
10,418,247
Issue date
Sep 17, 2019
VERSUM MATERIALS US, LLC
Krishna P. Murella
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metal compound chemically anchored colloidal particles and methods...
Patent number
10,160,884
Issue date
Dec 25, 2018
VERSUM MATERIALS US, LLC
Hongjun Zhou
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Composite abrasive particles for chemical mechanical planarization...
Patent number
10,109,493
Issue date
Oct 23, 2018
VERSUM MATERIALS US, LLC
Hongjun Zhou
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Chemical mechanical polishing (CMP) composition for shallow trench...
Patent number
10,011,741
Issue date
Jul 3, 2018
VERSUM MATERIALS US, LLC
Xiaobo Shi
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical polishing (CMP) composition for shallow trench...
Patent number
9,305,476
Issue date
Apr 5, 2016
Air Products and Chemicals, Inc.
Xiaobo Shi
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical polishing (CMP) composition for shallow trench...
Patent number
9,062,230
Issue date
Jun 23, 2015
Air Products and Chemicals, Inc.
Xiaobo Shi
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical polishing (CMP) composition for shallow trench...
Patent number
8,859,428
Issue date
Oct 14, 2014
Air Products and Chemicals, Inc.
Xiaobo Shi
C01 - INORGANIC CHEMISTRY
Patents Applications
last 30 patents
Information
Patent Application
Chemical Mechanical Planarization Polishing For Shallow Trench Isol...
Publication number
20240395558
Publication date
Nov 28, 2024
VERSUM MATERIALS US, LLC
Hongjun Zhou
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
High Oxide Removal Rates Shallow Trench Isolation Chemical Mechanic...
Publication number
20240297049
Publication date
Sep 5, 2024
VERSUM MATERIALS US, LLC
Joseph D. Rose
B24 - GRINDING POLISHING
Information
Patent Application
Chemical Mechanical Planarization (CMP) For Copper And Through-Sili...
Publication number
20240006189
Publication date
Jan 4, 2024
VERSUM MATERIALS US, LLC
Xiaobo Shi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Shared Data Induced Quality Control For A Chemical Mechanical Plana...
Publication number
20230325751
Publication date
Oct 12, 2023
VERSUM MATERIALS US, LLC
Cesar Clavero
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Low Dishing Oxide CMP Polishing Compositions For Shallow Trench Iso...
Publication number
20230193079
Publication date
Jun 22, 2023
VERSUM MATERIALS US, LLC
Xiaobo Shi
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
High Oxide Film Removal Rate Shallow Trench (STI) Chemical Mechanic...
Publication number
20230020073
Publication date
Jan 19, 2023
VERSUM MATERIALS US, LLC
Xiaobo Shi
B24 - GRINDING POLISHING
Information
Patent Application
Low Oxide Trench Dishing Chemical Mechanical Polishing
Publication number
20210324270
Publication date
Oct 21, 2021
VERSUM MATERIALS US, LLC
Xiaobo Shi
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Low Oxide Trench Dishing Chemical Mechanical Polishing
Publication number
20210309885
Publication date
Oct 7, 2021
VERSUM MATERIALS US, LLC
Xiaobo Shi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Low Oxide Trench Dishing Shallow Trench Isolation Chemical Mechanic...
Publication number
20210179890
Publication date
Jun 17, 2021
VERSUM MATERIALS US, LLC
Xiaobo Shi
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Shallow Trench Isolation Chemical And Mechanical Polishing Slurry
Publication number
20200270479
Publication date
Aug 27, 2020
VERSUM MATERIALS US, LLC
Joseph D. Rose
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Shallow Trench Isolation (STI) Chemical Mechanical Planarization (C...
Publication number
20200239736
Publication date
Jul 30, 2020
VERSUM MATERIALS US, LLC
Xiaobo Shi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Shallow Trench Isolation (STI) Chemical Mechanical Planarization (C...
Publication number
20200239735
Publication date
Jul 30, 2020
VERSUM MATERIALS US, LLC
Xiaobo Shi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Suppressing SiN Removal Rates And Reducing Oxide Trench Dishing For...
Publication number
20200131404
Publication date
Apr 30, 2020
VERSUM MATERIALS US, LLC
Xiaobo Shi
B24 - GRINDING POLISHING
Information
Patent Application
Composite Abrasive Particles for Chemical Mechanical Planarization...
Publication number
20200115590
Publication date
Apr 16, 2020
VERSUM MATERIALS US, LLC
Hongjun Zhou
B24 - GRINDING POLISHING
Information
Patent Application
High Oxide VS Nitride Selectivity, Low And Uniform Oxide Trench Dis...
Publication number
20200095502
Publication date
Mar 26, 2020
VERSUM MATERIALS US, LLC
Xiaobo Shi
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Chemical Mechanical Planarization For Tungsten-Containing Substrates
Publication number
20200079976
Publication date
Mar 12, 2020
VERSUM MATERIALS US, LLC
Xiaobo Shi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Oxide Chemical Mechanical Planarization (CMP) Polishing Compositions
Publication number
20200048496
Publication date
Feb 13, 2020
VERSUM MATERIALS US, LLC
Xiaobo Shi
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Chemical Mechanical Planarization Composition For Polishing Oxide M...
Publication number
20200048551
Publication date
Feb 13, 2020
VERSUM MATERIALS US, LLC
Ming-Shih Tsai
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Chemical Mechanical Planarization Of Films Comprising Elemental Sil...
Publication number
20200032108
Publication date
Jan 30, 2020
VERSUM MATERIALS US, LLC
James Matthew Henry
B24 - GRINDING POLISHING
Information
Patent Application
Low Oxide Trench Dishing Chemical Mechanical Polishing
Publication number
20200002607
Publication date
Jan 2, 2020
VERSUM MATERIALS US, LLC
Xiaobo Shi
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Low Oxide Trench Dishing Chemical Mechanical Polishing
Publication number
20200002608
Publication date
Jan 2, 2020
VERSUM MATERIALS US, LLC
Xiaobo Shi
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Low Oxide Trench Dishing Chemical Mechanical Polishing
Publication number
20200002574
Publication date
Jan 2, 2020
VERSUM MATERIALS US, LLC
Xiaobo Shi
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Composite Particles, Method of Refining And Use Thereof
Publication number
20190359868
Publication date
Nov 28, 2019
VERSUM MATERIALS US, LLC
Hongjun Zhou
B24 - GRINDING POLISHING
Information
Patent Application
Composite Particles, Method of Refining and Use Thereof
Publication number
20190127607
Publication date
May 2, 2019
VERSUM MATERIALS US, LLC
Joseph D. Rose
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Metal Compound Chemically Anchored Colloidal Particles and Methods...
Publication number
20190100678
Publication date
Apr 4, 2019
VERSUM MATERIALS US, LLC
Hongjun Zhou
C07 - ORGANIC CHEMISTRY
Information
Patent Application
Chemical Mechanical Planarization of Films Comprising Elemental Sil...
Publication number
20180244955
Publication date
Aug 30, 2018
VERSUM MATERIALS US, LLC
James Matthew Henry
B24 - GRINDING POLISHING
Information
Patent Application
Composite Particles, Method of Refining and Use Thereof
Publication number
20170283673
Publication date
Oct 5, 2017
Versum Materials US, LLC
Hongjun Zhou
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Composite Abrasive Particles For Chemical Mechanical Planarization...
Publication number
20170133236
Publication date
May 11, 2017
Air Products and Chemicals, Inc.
Krishna P. Murella
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Metal Compound Chemically Anchored Colloidal Particles and Methods...
Publication number
20160280962
Publication date
Sep 29, 2016
Air Products and Chemicals, Inc.
Hongjun Zhou
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Composite Abrasive Particles For Chemical Mechanical Planarization...
Publication number
20160200944
Publication date
Jul 14, 2016
Air Products and Chemicals, Inc.
Hongjun Zhou
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...