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Patents Grants
last 30 patents
Information
Patent Grant
MEMS device and fabrication method
Patent number
9,731,962
Issue date
Aug 15, 2017
Semiconductor Manufacturing International (Shanghai) Corporation
Xuanjie Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device and fabrication method
Patent number
9,371,223
Issue date
Jun 21, 2016
Semiconductor Manufacturing International (Shanghai) Corporation
Xuanjie Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
MEMS DEVICE AND FABRICATION METHOD
Publication number
20160264409
Publication date
Sep 15, 2016
Semiconductor Manufacturing International (Shangha) Corporation
XUANJIE LIU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE AND FABRICATION METHOD
Publication number
20150001632
Publication date
Jan 1, 2015
Semiconductor Manufacturing International (Shanghai) Corporation
XUANJIE LIU
B81 - MICRO-STRUCTURAL TECHNOLOGY