Hongqin Shi

Person

Mountain View, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for contact immersion lithography
- Patent number 11,892,777
- Issue date Feb 6, 2024
- Waymo LLC
- Hongqin Shi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Systems and methods for contact immersion lithography
- Patent number 11,500,295
- Issue date Nov 15, 2022
- Waymo LLC
- Hongqin Shi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Systems and methods for verifying photomask cleanliness
- Patent number 11,275,312
- Issue date Mar 15, 2022
- Waymo LLC
- James Dunphy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Systems and methods for lithography
- Patent number 10,948,830
- Issue date Mar 16, 2021
- Waymo LLC
- Hongqin Shi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for fabricating a curved eyepiece
- Patent number 10,338,390
- Issue date Jul 2, 2019
- Google LLC
- Ozan Cakmakci
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Method, apparatus and system for providing a uniform laminate struc...
- Patent number 9,789,675
- Issue date Oct 17, 2017
- Google Inc.
- Hongqin Shi
- B32 - LAYERED PRODUCTS
Information Patent Grant
Lens with lightguide insert for head wearable display
- Patent number 9,568,734
- Issue date Feb 14, 2017
- Google Inc.
- Sandeep Giri
- G02 - OPTICS
Information Patent Grant
Methods and systems for bonding multiple wafers
- Patent number 9,399,596
- Issue date Jul 26, 2016
- Google Inc.
- Hongqin Shi
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Lens with lightguide insert for head wearable display
- Patent number 9,213,178
- Issue date Dec 15, 2015
- Google Inc.
- Sandeep Giri
- G02 - OPTICS
Information Patent Grant
Releasing and post-releasing processes in fabrications for micromir...
- Patent number 8,395,837
- Issue date Mar 12, 2013
- Texas Instruments Incorporated
- Hongqin Shi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Speckle reduction in display systems that employ coherent light sou...
- Patent number 8,068,267
- Issue date Nov 29, 2011
- Texas Instruments Incorporated
- Regis Grasser
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Methods and apparatus of etch process control in fabrications of mi...
- Patent number 7,645,704
- Issue date Jan 12, 2010
- Texas Instruments Incorporated
- Hongqin Shi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromirror device and method for making the same
- Patent number 7,483,198
- Issue date Jan 27, 2009
- Texas Instruments Incorporated
- Jonathan Doan
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Micromirror devices and methods of making the same
- Patent number 7,362,494
- Issue date Apr 22, 2008
- Texas Instruments Incorporated
- Andrew Huibers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for depositing, releasing and packaging micro-electromechan...
- Patent number 7,307,775
- Issue date Dec 11, 2007
- Texas Instruments Incorporated
- Satayadev R. Patel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromirror devices with in-plane deformable hinge
- Patent number 7,215,459
- Issue date May 8, 2007
- Reflectivity, Inc.
- Andrew Huibers
- G02 - OPTICS
Information Patent Grant
Apparatus and method for detecting an endpoint in a vapor phase etch
- Patent number 7,189,332
- Issue date Mar 13, 2007
- Texas Instruments Incorporated
- Satyadev R. Patel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromirror device and method for making the same
- Patent number 7,119,944
- Issue date Oct 10, 2006
- Reflectivity, Inc.
- Satyadev Patel
- G02 - OPTICS
Information Patent Grant
Method for vapor phase etching of silicon
- Patent number 7,041,224
- Issue date May 9, 2006
- Reflectivity, Inc.
- Satyadev R. Patel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Etching method used in fabrications of microstructures
- Patent number 7,027,200
- Issue date Apr 11, 2006
- Reflectivity, Inc.
- Hongqin Shi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for achieving improved selectivity in an etching process
- Patent number 6,942,811
- Issue date Sep 13, 2005
- Reflectivity, Inc.
- Satyadev R. Patel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Etching method in fabrications of microstructures
- Patent number 6,939,472
- Issue date Sep 6, 2005
- Reflectivity, Inc.
- Gregory P. Schaadt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thin cell gap microdisplays with optimum optical properties
- Patent number 6,801,285
- Issue date Oct 5, 2004
- MicroDisplay Corporation
- Hongqin Shi
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Systems and Methods for Contact Immersion Lithography
- Publication number 20230055675
- Publication date Feb 23, 2023
- WAYMO LLC
- Hongqin Shi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Systems and Methods for Contact Immersion Lithography
- Publication number 20210191276
- Publication date Jun 24, 2021
- WAYMO LLC
- Hongqin Shi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR FABRICATING A CURVED EYEPIECE
- Publication number 20170363870
- Publication date Dec 21, 2017
- Google Inc.
- Ozan Cakmakci
- G02 - OPTICS
Information Patent Application
Releasing and post-releasing processes in fabrications for micromir...
- Publication number 20120184067
- Publication date Jul 19, 2012
- TEXAS INSTRUMENTS INCORPORATED
- Hongqin Shi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SPECKLE REDUCTION IN DISPLAY SYSTEMS THAT EMPLOY COHERENT LIGHT SOU...
- Publication number 20100079848
- Publication date Apr 1, 2010
- TEXAS INSTRUMENTS INCORPORATED
- Regis Grasser
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
System and Method for Display Illumination
- Publication number 20090059336
- Publication date Mar 5, 2009
- James Christopher Dunphy
- G02 - OPTICS
Information Patent Application
Methods for Depositing, Releasing and Packaging Micro-Electromechan...
- Publication number 20080096313
- Publication date Apr 24, 2008
- TEXAS INSTRUMENTS INCORPORATED
- Satayadev R. Patel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromirror devices and methods of making the same
- Publication number 20070241417
- Publication date Oct 18, 2007
- TEXAS INSTRUMENTS INCORPORATED
- Andrew Huibers
- G02 - OPTICS
Information Patent Application
SURFACE LUBRICATION IN MICROSTRUCTURES
- Publication number 20070154622
- Publication date Jul 5, 2007
- TEXAS INSTRUMENTS INCORPORATED
- Hongqin Shi
- G02 - OPTICS
Information Patent Application
APPARATUS AND METHOD FOR DETECTING AN ENDPOINT IN A VAPOR PHASE ETCH
- Publication number 20070119814
- Publication date May 31, 2007
- TEXAS INSTRUMENTS INCORPORATED
- Satyadev R. Patel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Removal of sacrificial materials in MEMS fabrications
- Publication number 20060096705
- Publication date May 11, 2006
- Hongqin Shi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromirror device and method for making the same
- Publication number 20060056005
- Publication date Mar 16, 2006
- Satyadev Patel
- G02 - OPTICS
Information Patent Application
Micromirror devices with in-plane deformable hinge
- Publication number 20060056006
- Publication date Mar 16, 2006
- Andrew Huibers
- G02 - OPTICS
Information Patent Application
Micromirror device and method for making the same
- Publication number 20050157375
- Publication date Jul 21, 2005
- Jonathan Doan
- B82 - NANO-TECHNOLOGY
Information Patent Application
Methods for depositing, releasing and packaging micro-electromechan...
- Publication number 20050074919
- Publication date Apr 7, 2005
- REFLECTIVITY, INC.
- Satayadev R. Patel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Etching method in fabrications of microstructures
- Publication number 20050059253
- Publication date Mar 17, 2005
- Gregory P. Schaadt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Methods and apparatus of etch process control in fabrications of mi...
- Publication number 20050059254
- Publication date Mar 17, 2005
- Hongqin Shi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Etching method used in fabrications of microstructures
- Publication number 20050020089
- Publication date Jan 27, 2005
- Hongqin Shi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Apparatus and method for detecting an endpoint in a vapor phase etch
- Publication number 20040069747
- Publication date Apr 15, 2004
- REFLECTIVITY, INC., a California corporation
- Satyadev R. Patel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Thin cell gap microdisplays with optimum optical properties
- Publication number 20030053017
- Publication date Mar 20, 2003
- Hongqin Shi
- G02 - OPTICS
Information Patent Application
Method for vapor phase etching of silicon
- Publication number 20020195423
- Publication date Dec 26, 2002
- REFLECTIVITY, INC.
- Satyadev R. Patel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for achieving improved selectivity in an etching process
- Publication number 20020121502
- Publication date Sep 5, 2002
- Satyadev R. Patel
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Hongqin Shi

Person

Patents Grantslast 30 patents

Systems and methods for contact immersion lithography

Systems and methods for contact immersion lithography

Systems and methods for verifying photomask cleanliness

Systems and methods for lithography

Method for fabricating a curved eyepiece

Method, apparatus and system for providing a uniform laminate struc...

Lens with lightguide insert for head wearable display

Methods and systems for bonding multiple wafers

Lens with lightguide insert for head wearable display

Releasing and post-releasing processes in fabrications for micromir...

Speckle reduction in display systems that employ coherent light sou...

Methods and apparatus of etch process control in fabrications of mi...

Micromirror device and method for making the same

Micromirror devices and methods of making the same

Methods for depositing, releasing and packaging micro-electromechan...

Micromirror devices with in-plane deformable hinge

Apparatus and method for detecting an endpoint in a vapor phase etch

Micromirror device and method for making the same

Method for vapor phase etching of silicon

Etching method used in fabrications of microstructures

Method for achieving improved selectivity in an etching process

Etching method in fabrications of microstructures

Thin cell gap microdisplays with optimum optical properties

Patents Applicationslast 30 patents

Systems and Methods for Contact Immersion Lithography

Systems and Methods for Contact Immersion Lithography

METHOD FOR FABRICATING A CURVED EYEPIECE

Releasing and post-releasing processes in fabrications for micromir...

SPECKLE REDUCTION IN DISPLAY SYSTEMS THAT EMPLOY COHERENT LIGHT SOU...

System and Method for Display Illumination

Methods for Depositing, Releasing and Packaging Micro-Electromechan...

Micromirror devices and methods of making the same

SURFACE LUBRICATION IN MICROSTRUCTURES

APPARATUS AND METHOD FOR DETECTING AN ENDPOINT IN A VAPOR PHASE ETCH

Removal of sacrificial materials in MEMS fabrications

Micromirror device and method for making the same

Micromirror devices with in-plane deformable hinge

Micromirror device and method for making the same

Methods for depositing, releasing and packaging micro-electromechan...

Etching method in fabrications of microstructures

Methods and apparatus of etch process control in fabrications of mi...

Etching method used in fabrications of microstructures

Apparatus and method for detecting an endpoint in a vapor phase etch

Thin cell gap microdisplays with optimum optical properties

Method for vapor phase etching of silicon

Method for achieving improved selectivity in an etching process