Hongtaek LIM

Person

Seoul, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Vacuum chuck, substrate processing apparatus including the same and...
- Patent number 11,476,151
- Issue date Oct 18, 2022
- Samsung Electronics Co., Ltd.
- Byounghoon Ji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas mixer and semiconductor device fabricating apparatuses includin...
- Patent number 10,468,234
- Issue date Nov 5, 2019
- Samsung Electronics Co., Ltd.
- Hongtaek Lim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND S...
- Publication number 20240093368
- Publication date Mar 21, 2024
- Samsung Electronics Co., Ltd.
- HONGTAEK LIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITING ATOMIC LAYER AND METHOD OF MANUFACTURING SEMIC...
- Publication number 20230420248
- Publication date Dec 28, 2023
- Samsung Electronics Co., Ltd.
- Hyunjun AHN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE RING, SUBSTRATE PROCESSING APPARATUS HAVING THE SAME AND METHO...
- Publication number 20210202217
- Publication date Jul 1, 2021
- Samsung Electronics Co., Ltd.
- Hongtaek Lim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM CHUCK, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME AND...
- Publication number 20210074574
- Publication date Mar 11, 2021
- Samsung Electronics Co., Ltd.
- Byounghoon Ji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS MIXER AND SEMICONDUCTOR DEVICE FABRICATING APPARATUSES INCLUDIN...
- Publication number 20170084471
- Publication date Mar 23, 2017
- Samsung Electronics Co., Ltd.
- Hongtaek LIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS HAVING GAS SPRAY UNIT
- Publication number 20160194756
- Publication date Jul 7, 2016
- Samsung Electronics Co., Ltd.
- Hongtaek LIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Hongtaek LIM

Person

Patents Grantslast 30 patents

Vacuum chuck, substrate processing apparatus including the same and...

Gas mixer and semiconductor device fabricating apparatuses includin...

Patents Applicationslast 30 patents

EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND S...

METHOD OF DEPOSITING ATOMIC LAYER AND METHOD OF MANUFACTURING SEMIC...

EDGE RING, SUBSTRATE PROCESSING APPARATUS HAVING THE SAME AND METHO...

VACUUM CHUCK, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME AND...

GAS MIXER AND SEMICONDUCTOR DEVICE FABRICATING APPARATUSES INCLUDIN...

SEMICONDUCTOR PROCESSING APPARATUS HAVING GAS SPRAY UNIT