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Hoonseop KIM
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Suwon-si, KR
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Patents Grants
last 30 patents
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Patent Grant
Method of cleaning collector of EUV light source system
Patent number
11,940,620
Issue date
Mar 26, 2024
Samsung Electronics Co., Ltd.
Changsoon Lim
B08 - CLEANING
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Patent Grant
Semiconductor substrate measuring apparatus, semiconductor substrat...
Patent number
11,287,323
Issue date
Mar 29, 2022
Samsung Electronics Co., Ltd.
Hoonseop Kim
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
METHOD OF CLEANING COLLECTOR OF EUV LIGHT SOURCE SYSTEM
Publication number
20220308339
Publication date
Sep 29, 2022
Samsung Electronics Co., Ltd.
Changsoon LIM
B08 - CLEANING
Information
Patent Application
SEMICONDUCTOR SUBSTRATE MEASURING APPARATUS, SEMICONDUCTOR SUBSTRAT...
Publication number
20210102841
Publication date
Apr 8, 2021
Samsung Electronics Co., LTD
Hoonseop KIM
H01 - BASIC ELECTRIC ELEMENTS