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Horst Engel
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Giessen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for the determination of layer thicknesses
Patent number
6,826,511
Issue date
Nov 30, 2004
Leica Microsystems Jena GmbH
Hakon Mikkelsen
G01 - MEASURING TESTING
Information
Patent Grant
Optical measurement arrangement, in particular for layer thickness...
Patent number
6,618,154
Issue date
Sep 9, 2003
Leica Microsystems Jena GmbH
Horst Engel
G01 - MEASURING TESTING
Information
Patent Grant
Optical measurement arrangement having an ellipsometer
Patent number
6,600,560
Issue date
Jul 29, 2003
Leica Microsystems Jena GmbH
Hakon Mikkelsen
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Method for automatic determination of optical parameters of a layer...
Publication number
20040027580
Publication date
Feb 12, 2004
Hans-Artur Bosser
G01 - MEASURING TESTING
Information
Patent Application
Method for the determination of layer thicknesses
Publication number
20030147085
Publication date
Aug 7, 2003
Leica Microsystems Jena GmbH
Hakon Mikkelsen
G01 - MEASURING TESTING
Information
Patent Application
Optical measurement arrangement having an ellipsometer
Publication number
20020027657
Publication date
Mar 7, 2002
Hakon Mikkelsen
G01 - MEASURING TESTING
Information
Patent Application
Optical measurement arrangement, in particular for layer thickness...
Publication number
20020003217
Publication date
Jan 10, 2002
Horst Engel
G01 - MEASURING TESTING