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Hotaka MARUYAMA
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Miyagi, JP
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Patents Grants
last 30 patents
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Patent Grant
Etching method and etching apparatus
Patent number
9,865,471
Issue date
Jan 9, 2018
Tokyo Electron Limited
Gaku Shimoda
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
ETCHING METHOD AND ETCHING APPARATUS
Publication number
20160322230
Publication date
Nov 3, 2016
TOKYO ELECTRON LIMITED
Gaku SHIMODA
H01 - BASIC ELECTRIC ELEMENTS