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Hou Tee Ng
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Singapore, SG
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Patents Grants
last 30 patents
Information
Patent Grant
Method to encapsulate copper plug for interconnect metallization
Patent number
6,696,761
Issue date
Feb 24, 2004
Chartered Semiconductor Manufacturing Ltd.
Lap Chan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Highly selective and complete interconnect metal line and via/conta...
Patent number
6,660,636
Issue date
Dec 9, 2003
The National University of Singapore
Sam Fong Yau Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method to deposit a seeding layer for electroless copper plating
Patent number
6,495,200
Issue date
Dec 17, 2002
Chartered Semiconductor Manufacturing Ltd.
Lap Chan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method to form uniform silicide features
Patent number
6,281,117
Issue date
Aug 28, 2001
Chartered Semiconductor Manufacturing Ltd.
Lap Chan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method to encapsulate copper plug for interconnect metallization
Patent number
6,214,728
Issue date
Apr 10, 2001
Chartered Semiconductor Manufacturing, Ltd.
Lap Chan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High precision three-dimensional alignment system for lithography,...
Patent number
6,181,097
Issue date
Jan 30, 2001
Institute of Materials Research and Engineering
Sam Fong Yau Li
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method for planarized interconnect vias using electroless plating a...
Patent number
6,136,693
Issue date
Oct 24, 2000
Chartered Semiconductor Manufacturing Ltd.
Lap Chan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
METHOD TO ENCAPSULATE COPPER PLUG FOR INTERCONNECT METALLIZATION
Publication number
20040009664
Publication date
Jan 15, 2004
Chartered Semiconductor Manufacturing Ltd.
Lap Chan
H01 - BASIC ELECTRIC ELEMENTS