Howard Dang

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Milpitas, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Wafer electrical discharge control using argon free dechucking gas
- Patent number 7,892,445
- Issue date Feb 22, 2011
- Lam Research Corporation
- David Wei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Preventing damage to low-k materials during resist stripping
- Patent number 7,385,287
- Issue date Jun 10, 2008
- Lam Research Corporation
- Siyi Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Preventing damage to low-k materials during resist stripping
- Patent number 7,226,852
- Issue date Jun 5, 2007
- Lam Research Corporation
- Siyi Li
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PREVENTING DAMAGE TO LOW-K MATERIALS DURING RESIST STRIPPING
- Publication number 20070287292
- Publication date Dec 13, 2007
- LAM RESEARCH CORPORATION
- Siyi LI
- H01 - BASIC ELECTRIC ELEMENTS