Howard E. Grunes

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Coils for generating a plasma and for sputtering
- Patent number 8,398,832
- Issue date Mar 19, 2013
- Applied Materials Inc.
- Jaim Nulman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing chamber configured for uniform gas flow
- Patent number 7,422,637
- Issue date Sep 9, 2008
- Applied Materials, Inc.
- Vincent Ku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electroless deposition apparatus
- Patent number 7,138,014
- Issue date Nov 21, 2006
- Applied Materials, Inc.
- Joseph J. Stevens
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
End point detection for sputtering and resputtering
- Patent number 7,048,837
- Issue date May 23, 2006
- Applied Materials, Inc.
- Sasson R. Somekh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electroless plating system
- Patent number 6,824,612
- Issue date Nov 30, 2004
- Applied Materials, Inc.
- Joseph J. Stevens
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multiple independent robot assembly and apparatus for processing an...
- Patent number 6,799,939
- Issue date Oct 5, 2004
- Applied Materials, Inc.
- Robert B. Lowrance
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coils for generating a plasma and for sputtering
- Patent number 6,783,639
- Issue date Aug 31, 2004
- Applied Materials
- Jaim Nulman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-tool control system, method and medium
- Patent number 6,640,151
- Issue date Oct 28, 2003
- Applied Materials, Inc.
- Sasson Somekh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for improved substrate handling
- Patent number 6,575,737
- Issue date Jun 10, 2003
- Applied Materials, Inc.
- Ilya Perlov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load-lock with external staging area
- Patent number 6,486,444
- Issue date Nov 26, 2002
- Applied Materials, Inc.
- Kevin Fairbairn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for improved substrate handling
- Patent number 6,468,353
- Issue date Oct 22, 2002
- Applied Materials, Inc.
- Ilya Perlov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for forming a uniform layer on a workpiece dur...
- Patent number 6,409,890
- Issue date Jun 25, 2002
- Applied Materials, Inc.
- Howard E. Grunes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coils for generating a plasma and for sputtering
- Patent number 6,368,469
- Issue date Apr 9, 2002
- Applied Materials, Inc.
- Jaim Nulman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Recessed coil for generating a plasma
- Patent number 6,254,746
- Issue date Jul 3, 2001
- Applied Materials, Inc.
- Anantha Subramani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple independent robot assembly and apparatus for processing an...
- Patent number 6,102,164
- Issue date Aug 15, 2000
- Applied Materials, Inc.
- William McClintock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Robot assembly
- Patent number 5,879,127
- Issue date Mar 9, 1999
- Applied Materials, Inc.
- Howard Grunes
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Clamp ring for shielding a substrate during film layer deposition
- Patent number 5,868,847
- Issue date Feb 9, 1999
- Applied Materials, Inc.
- Aihua Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for fabricating metal paths in semiconductor s...
- Patent number 5,857,368
- Issue date Jan 12, 1999
- Applied Materials, Inc.
- Howard Grunes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High aspect ratio clamp ring
- Patent number 5,810,931
- Issue date Sep 22, 1998
- Applied Materials, Inc.
- Joe Stevens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Slotted RF coil shield for plasma deposition system
- Patent number 5,763,851
- Issue date Jun 9, 1998
- Applied Materials, Inc.
- John Forster
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Screwless shield assembly for vacuum processing chambers
- Patent number 5,690,795
- Issue date Nov 25, 1997
- Applied Materials, Inc.
- Michael Rosenstein
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Robot assembly
- Patent number 5,678,980
- Issue date Oct 21, 1997
- Applied Materials, Inc.
- Howard Grunes
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Wafer spacing mask for a substrate support chuck and method of fabr...
- Patent number 5,656,093
- Issue date Aug 12, 1997
- Applied Materials, Inc.
- Vincent E. Burkhart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer cassette transfer system
- Patent number 5,556,248
- Issue date Sep 17, 1996
- Applied Materials, Inc.
- Howard E. Grunes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of heating and cooling a wafer during semiconductor processing
- Patent number 5,484,011
- Issue date Jan 16, 1996
- Applied Materials, Inc.
- Avi Tepman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Robot assembly
- Patent number 5,447,409
- Issue date Sep 5, 1995
- Applied Materials, Inc.
- Howard Grunes
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Direct load/unload semiconductor wafer cassette apparatus and trans...
- Patent number 5,387,067
- Issue date Feb 7, 1995
- Applied Materials, Inc.
- Howard E. Grunes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Physical vapor deposition clamping mechanism and heater/cooler
- Patent number 5,228,501
- Issue date Jul 20, 1993
- Applied Materials, Inc.
- Avi Tepman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Staged-vacuum wafer processing system and method
- Patent number 5,186,718
- Issue date Feb 16, 1993
- Applied Materials, Inc.
- Avi Tepman
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
COILS FOR GENERATING A PLASMA AND FOR SPUTTERING
- Publication number 20130168232
- Publication date Jul 4, 2013
- Jaim NULMAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING CHAMBER CONFIGURED FOR UNIFORM GAS FLOW
- Publication number 20070044719
- Publication date Mar 1, 2007
- APPLIED MATERIALS, INC.
- Vincent Ku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Coils for generating a plasma and for sputtering
- Publication number 20060070875
- Publication date Apr 6, 2006
- APPLIED MATERIALS, INC.
- Jaim Nulman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electroless deposition apparatus
- Publication number 20050199489
- Publication date Sep 15, 2005
- APPLIED MATERIALS, INC.
- Joseph J. Stevens
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
End point detection for sputtering and resputtering
- Publication number 20050173239
- Publication date Aug 11, 2005
- APPLIED MATERIALS, INC.
- Sasson R. Somekh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Coils for generating a plasma and for sputtering
- Publication number 20040256217
- Publication date Dec 23, 2004
- Jaim Nulman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-tool control system, method and medium
- Publication number 20040083021
- Publication date Apr 29, 2004
- APPLIED MATERIALS, INC.
- Sasson Somekh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing chamber configured for uniform gas flow
- Publication number 20040069227
- Publication date Apr 15, 2004
- APPLIED MATERIALS, INC.
- Vincent Ku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Wafer backside electrical contact for electrochemical deposition an...
- Publication number 20040055893
- Publication date Mar 25, 2004
- APPLIED MATERIALS, INC.
- Dmitry Lubomirsky
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Multiple independent robot assembly and apparatus and control syste...
- Publication number 20040005211
- Publication date Jan 8, 2004
- Robert B. Lowrance
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for plating metal onto wafers
- Publication number 20030196901
- Publication date Oct 23, 2003
- APPLIED MATERIALS, INC.
- Howard E. Grunes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multiple independent robot assembly and apparatus for processing an...
- Publication number 20030180139
- Publication date Sep 25, 2003
- William McClintock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electroless deposition apparatus
- Publication number 20030141018
- Publication date Jul 31, 2003
- APPLIED MATERIALS, INC.
- Joseph J. Stevens
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Electroless plating system
- Publication number 20030118732
- Publication date Jun 26, 2003
- Joseph J. Stevens
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for improved substrate handling
- Publication number 20020170672
- Publication date Nov 21, 2002
- Ilya Perlov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coils for generating a plasma and for sputtering
- Publication number 20020144901
- Publication date Oct 10, 2002
- Jaim Nulman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multiple independent robot assembly and apparatus for processing an...
- Publication number 20020127091
- Publication date Sep 12, 2002
- Robert B. Lowrance
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multiple independent robot assembly and apparatus for processing an...
- Publication number 20020029936
- Publication date Mar 14, 2002
- William McClintock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pod door opener
- Publication number 20020006322
- Publication date Jan 17, 2002
- APPLIED MATERIALS, INC.
- Ilya Perlov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Single chamber vacuum processing tool
- Publication number 20010041121
- Publication date Nov 15, 2001
- Howard E. Grunes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Recessed coil for generating a plasma
- Publication number 20010019016
- Publication date Sep 6, 2001
- Anantha Subramani
- H01 - BASIC ELECTRIC ELEMENTS

Howard E. Grunes

Person

Patents Grantslast 30 patents

Coils for generating a plasma and for sputtering

Processing chamber configured for uniform gas flow

Electroless deposition apparatus

End point detection for sputtering and resputtering

Electroless plating system

Multiple independent robot assembly and apparatus for processing an...

Coils for generating a plasma and for sputtering

Multi-tool control system, method and medium

Method and apparatus for improved substrate handling

Load-lock with external staging area

Method and apparatus for improved substrate handling

Method and apparatus for forming a uniform layer on a workpiece dur...

Coils for generating a plasma and for sputtering

Recessed coil for generating a plasma

Multiple independent robot assembly and apparatus for processing an...

Robot assembly

Clamp ring for shielding a substrate during film layer deposition

Apparatus and method for fabricating metal paths in semiconductor s...

High aspect ratio clamp ring

Slotted RF coil shield for plasma deposition system

Screwless shield assembly for vacuum processing chambers

Robot assembly

Wafer spacing mask for a substrate support chuck and method of fabr...

Semiconductor wafer cassette transfer system

Method of heating and cooling a wafer during semiconductor processing

Robot assembly

Direct load/unload semiconductor wafer cassette apparatus and trans...

Physical vapor deposition clamping mechanism and heater/cooler

Staged-vacuum wafer processing system and method

Patents Applicationslast 30 patents

COILS FOR GENERATING A PLASMA AND FOR SPUTTERING

PROCESSING CHAMBER CONFIGURED FOR UNIFORM GAS FLOW

Coils for generating a plasma and for sputtering

Electroless deposition apparatus

End point detection for sputtering and resputtering

Coils for generating a plasma and for sputtering

Multi-tool control system, method and medium

Processing chamber configured for uniform gas flow

Wafer backside electrical contact for electrochemical deposition an...

Multiple independent robot assembly and apparatus and control syste...

Method for plating metal onto wafers

Multiple independent robot assembly and apparatus for processing an...

Electroless deposition apparatus

Electroless plating system

Method and apparatus for improved substrate handling

Coils for generating a plasma and for sputtering

Multiple independent robot assembly and apparatus for processing an...

Multiple independent robot assembly and apparatus for processing an...

Pod door opener

Single chamber vacuum processing tool

Recessed coil for generating a plasma