Hoyoung Kang

Person

Guilderland, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Replacement buried power rail in backside power delivery
- Patent number 12,354,991
- Issue date Jul 8, 2025
- Tokyo Electron Limited
- Hoyoung Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for backside deposition of a substrate
- Patent number 12,341,053
- Issue date Jun 24, 2025
- Tokyo Electron Limited
- Ronald Nasman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for backside deposition of a substrate
- Patent number 11,908,728
- Issue date Feb 20, 2024
- Tokyo Electron Limited
- Ronald Nasman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cyclic self-limiting etch process
- Patent number 11,791,167
- Issue date Oct 17, 2023
- Tokyo Electron Limited
- Anthony R. Schepis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for globally adjusting spacer critical dimension using photo...
- Patent number 11,567,407
- Issue date Jan 31, 2023
- Tokyo Electron Limited
- Richard Farrell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holding apparatus and method for shape metrology
- Patent number 11,484,993
- Issue date Nov 1, 2022
- Tokyo Electron Limited
- Hoyoung Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for prevention of metal contamination by using a...
- Patent number 11,460,775
- Issue date Oct 4, 2022
- Tokyo Electron Limited
- Hoyoung Kang
- B08 - CLEANING
Information Patent Grant
Fast imprint lithography
- Patent number 11,314,166
- Issue date Apr 26, 2022
- Tokyo Electron Limited
- Hoyoung Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holding apparatus and method for shape metrology
- Patent number 11,247,309
- Issue date Feb 15, 2022
- Tokyo Electron Limited
- Hoyoung Kang
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Systems and methods for inhibiting detectivity, metal particle cont...
- Patent number 11,043,378
- Issue date Jun 22, 2021
- Tokyo Electron Limited
- Corey Lemley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fast imprint lithography
- Patent number 10,890,843
- Issue date Jan 12, 2021
- Tokyo Electron Limited
- Hoyoung Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Back-side friction reduction of a substrate
- Patent number 10,784,100
- Issue date Sep 22, 2020
- Tokyo Electron Limited
- Hoyoung Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for coating a substrate with a fluid
- Patent number 10,707,070
- Issue date Jul 7, 2020
- Tokyo Electron Limited
- Hoyoung Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of liquid filter wetting
- Patent number 10,525,416
- Issue date Jan 7, 2020
- Tokyo Electron Limited
- Hoyoung Kang
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Back-side friction reduction of a substrate
- Patent number 10,504,715
- Issue date Dec 10, 2019
- Tokyo Electron Limited
- Hoyoung Kang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for forming memory fin patterns
- Patent number 10,115,726
- Issue date Oct 30, 2018
- Tokyo Electron Limited
- Hoyoung Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective metal oxide deposition using a self-assembled monolayer s...
- Patent number 10,068,764
- Issue date Sep 4, 2018
- Tokyo Electron Limited
- Kandabara N. Tapily
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of improving line roughness in substrate processing
- Patent number 9,508,557
- Issue date Nov 29, 2016
- Tokyo Electron Limited
- Hoyoung Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a memory capacitor structure using a self-assembl...
- Patent number 9,385,129
- Issue date Jul 5, 2016
- Tokyo Electron Limited
- Hoyoung Kang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS OF ESTIMATING LINE WIDTH AND SYSTEMS THEREOF
- Publication number 20250189302
- Publication date Jun 12, 2025
- TOKYO ELECTRON LIMITED
- Hoyoung Kang
- G01 - MEASURING TESTING
Information Patent Application
WAFER BOW METROLOGY SYSTEM
- Publication number 20250132180
- Publication date Apr 24, 2025
- TOKYO ELECTRON LIMITED
- Hoyoung KANG
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR BACKSIDE DEPOSITION OF A SUBSTRATE
- Publication number 20240194516
- Publication date Jun 13, 2024
- TOKYO ELECTRON LIMITED
- Ronald Nasman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
High Heat Capacity Hot Plate
- Publication number 20240170307
- Publication date May 23, 2024
- TOKYO ELECTRON LIMITED
- Hoyoung Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Holding Apparatus and Method for Shape Metrology
- Publication number 20220143786
- Publication date May 12, 2022
- TOKYO ELECTRON LIMITED
- Hoyoung Kang
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Cyclic Self-Limiting Etch Process
- Publication number 20210305060
- Publication date Sep 30, 2021
- TOKYO ELECTRON LIMITED
- Anthony R. Schepis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Fast Imprint Lithography
- Publication number 20210132494
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Hoyoung Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REPLACEMENT BURIED POWER RAIL IN BACKSIDE POWER DELIVERY
- Publication number 20200266169
- Publication date Aug 20, 2020
- TOKYO ELECTRON LIMITED
- Hoyoung KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR INHIBITING DEFECTIVITY, METAL PARTICLE CONT...
- Publication number 20200152453
- Publication date May 14, 2020
- TOKYO ELECTRON LIMITED
- Corey LEMLEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR GLOBALLY ADJUSTING SPACER CRITICAL DIMENSION USING PHOTO...
- Publication number 20200103755
- Publication date Apr 2, 2020
- TOKYO ELECTRON LIMITED
- Richard FARRELL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR PREVENTION OF METAL CONTAMINATION BY USING A...
- Publication number 20200073244
- Publication date Mar 5, 2020
- TOKYO ELECTRON LIMITED
- Hoyoung Kang
- B08 - CLEANING
Information Patent Application
Substrate Holding Apparatus and Method for Shape Metrology
- Publication number 20190283218
- Publication date Sep 19, 2019
- TOKYO ELECTRON LIMITED
- Hoyoung Kang
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
METHODS AND SYSTEMS FOR COATING A SUBSTRATE WITH A FLUID
- Publication number 20190103268
- Publication date Apr 4, 2019
- TOKYO ELECTRON LIMITED
- Hoyoung Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Fast Imprint Lithography
- Publication number 20190033711
- Publication date Jan 31, 2019
- TOKYO ELECTRON LIMITED
- Hoyoung Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR BACKSIDE DEPOSITION OF A SUBSTRATE
- Publication number 20190035646
- Publication date Jan 31, 2019
- TOKYO ELECTRON LIMITED
- Ronald Nasman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR FORMING MEMORY FIN PATTERNS
- Publication number 20190027481
- Publication date Jan 24, 2019
- TOKYO ELECTRON LIMITED
- Hoyoung Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF LIQUID FILTER WETTING
- Publication number 20180333680
- Publication date Nov 22, 2018
- TOKYO ELECTRON LIMITED
- Hoyoung Kang
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
BACK-SIDE FRICTION REDUCTION OF A SUBSTRATE
- Publication number 20180082833
- Publication date Mar 22, 2018
- TOKYO ELECTRON LIMITED
- Hoyoung Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE METAL OXIDE DEPOSITION USING A SELF-ASSEMBLED MONOLAYER S...
- Publication number 20180076027
- Publication date Mar 15, 2018
- TOKYO ELECTRON LIMITED
- Kandabara N. Tapily
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BACK-SIDE FRICTION REDUCTION OF A SUBSTRATE
- Publication number 20180025899
- Publication date Jan 25, 2018
- TOKYO ELECTRON LIMITED
- Hoyoung Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR FORMING MEMORY FIN PATTERNS
- Publication number 20170221902
- Publication date Aug 3, 2017
- TOKYO ELECTRON LIMITED
- Hoyoung Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF IMPROVING LINE ROUGHNESS IN SUBSTRATE PROCESSING
- Publication number 20160148812
- Publication date May 26, 2016
- TOKYO ELECTRON LIMITED
- Hoyoung Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING A MEMORY CAPACITOR STRUCTURE USING A SELF-ASSEMBL...
- Publication number 20160141290
- Publication date May 19, 2016
- TOKYO ELECTRON LIMITED
- Hoyoung Kang
- H01 - BASIC ELECTRIC ELEMENTS

Hoyoung Kang

Person

Patents Grantslast 30 patents

Replacement buried power rail in backside power delivery

System for backside deposition of a substrate

System for backside deposition of a substrate

Cyclic self-limiting etch process

Method for globally adjusting spacer critical dimension using photo...

Substrate holding apparatus and method for shape metrology

Method and system for prevention of metal contamination by using a...

Fast imprint lithography

Substrate holding apparatus and method for shape metrology

Systems and methods for inhibiting detectivity, metal particle cont...

Fast imprint lithography

Back-side friction reduction of a substrate

Methods and systems for coating a substrate with a fluid

Method of liquid filter wetting

Back-side friction reduction of a substrate

Method and system for forming memory fin patterns

Selective metal oxide deposition using a self-assembled monolayer s...

Method of improving line roughness in substrate processing

Method of forming a memory capacitor structure using a self-assembl...

Patents Applicationslast 30 patents

METHODS OF ESTIMATING LINE WIDTH AND SYSTEMS THEREOF

WAFER BOW METROLOGY SYSTEM

SYSTEM AND METHOD FOR BACKSIDE DEPOSITION OF A SUBSTRATE

High Heat Capacity Hot Plate

Substrate Holding Apparatus and Method for Shape Metrology

Cyclic Self-Limiting Etch Process

Fast Imprint Lithography

REPLACEMENT BURIED POWER RAIL IN BACKSIDE POWER DELIVERY

SYSTEMS AND METHODS FOR INHIBITING DEFECTIVITY, METAL PARTICLE CONT...

METHOD FOR GLOBALLY ADJUSTING SPACER CRITICAL DIMENSION USING PHOTO...

METHOD AND SYSTEM FOR PREVENTION OF METAL CONTAMINATION BY USING A...

Substrate Holding Apparatus and Method for Shape Metrology

METHODS AND SYSTEMS FOR COATING A SUBSTRATE WITH A FLUID

Fast Imprint Lithography

SYSTEM AND METHOD FOR BACKSIDE DEPOSITION OF A SUBSTRATE

METHOD AND SYSTEM FOR FORMING MEMORY FIN PATTERNS

METHOD OF LIQUID FILTER WETTING

BACK-SIDE FRICTION REDUCTION OF A SUBSTRATE

SELECTIVE METAL OXIDE DEPOSITION USING A SELF-ASSEMBLED MONOLAYER S...

BACK-SIDE FRICTION REDUCTION OF A SUBSTRATE

METHOD AND SYSTEM FOR FORMING MEMORY FIN PATTERNS

METHOD OF IMPROVING LINE ROUGHNESS IN SUBSTRATE PROCESSING

METHOD OF FORMING A MEMORY CAPACITOR STRUCTURE USING A SELF-ASSEMBL...