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Zhudong Town, TW
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last 30 patents
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Patent Grant
Method of making and using alloy susceptor with improved properties...
Patent number
8,147,909
Issue date
Apr 3, 2012
Taiwan Semiconductor Manufacturing Company, Ltd.
Shuo-Jieh Wu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
ALLOY SUSCEPTOR WITH IMPROVED PROPERTIES FOR FILM DEPOSITION
Publication number
20100247773
Publication date
Sep 30, 2010
Taiwan Semiconductor Manufacturing Company, Ltd.
Shuo-Jieh Wu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...