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Hsi-Lung Lee
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Jhudong Township, TW
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last 30 patents
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Patent Grant
Semiconductor fabrication method suitable for MEMS
Patent number
8,084,361
Issue date
Dec 27, 2011
Taiwan Semiconductor Manufacturing Co., Ltd.
Tsung-Cheng Huang
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
SEMICONDUCTOR FABRICATION METHOD SUITABLE FOR MEMS
Publication number
20080299769
Publication date
Dec 4, 2008
Taiwan Semiconductor Manufacturing Co., LTD
Tsung-Cheng Huang
B81 - MICRO-STRUCTURAL TECHNOLOGY