Hsi-Shui Liu

Follow

Person

Yangmei Township, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Replaceable electrostatic chuck sidewall shield
- Patent number 9,543,181
- Issue date Jan 10, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsi-Shui Liu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Replaceable Electrostatic Chuck Sidewall Shield
- Publication number 20100027188
- Publication date Feb 4, 2010
- Hsi-Shui Liu
- H01 - BASIC ELECTRIC ELEMENTS