Hsiang-Chu Hu

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Tainan City, TW

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Patents Grantslast 30 patents

Information Patent Grant
System, control method and apparatus for chemical mechanical polishing
- Patent number 10,792,783
- Issue date Oct 6, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsiang-Chu Hu
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM, CONTROL METHOD AND APPARATUS FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20190160625
- Publication date May 30, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsiang-Chu Hu
- B24 - GRINDING POLISHING