Hsiang-Sheng KUNG

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Zhubei City, TW

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Patents Grantslast 30 patents

Information Patent Grant
Method for controlling plasma in semiconductor fabrication
- Patent number 10,867,787
- Issue date Dec 15, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Cheng-Tsung Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for controlling plasma in semiconductor fabrication
- Patent number 10,395,918
- Issue date Aug 27, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Cheng-Tsung Wu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR CONTROLLING PLASMA IN SEMICONDUCTOR FABRICATION
- Publication number 20190378714
- Publication date Dec 12, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Cheng-Tsung WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR CONTROLLING PLASMA IN SEMICONDUCTOR FABRICATION
- Publication number 20160343625
- Publication date Nov 24, 2016
- Taiwan Semiconductor Manufacturing Co., LTD
- Cheng-Tsung WU
- B08 - CLEANING