Hsiao Wei Chang

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Ultrahigh selective nitride etch to form FinFET devices
- Patent number 11,469,079
- Issue date Oct 11, 2022
- Lam Research Corporation
- Kwame Eason
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma apparatus for high aspect ratio selective lateral etch using...
- Patent number 11,011,388
- Issue date May 18, 2021
- Lam Research Corporation
- Kwame Eason
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High aspect ratio selective lateral etch using cyclic passivation a...
- Patent number 10,276,398
- Issue date Apr 30, 2019
- Lam Research Corporation
- Kwame Eason
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ULTRAHIGH SELECTIVE NITRIDE ETCH TO FORM FINFET DEVICES
- Publication number 20230084901
- Publication date Mar 16, 2023
- LAM RESEARCH CORPORATION
- Kwame EASON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH ASPECT RATIO SELECTIVE LATERAL ETCH USING CYCLIC PASSIVATION A...
- Publication number 20190206697
- Publication date Jul 4, 2019
- LAM RESEARCH CORPORATION
- Kwame Eason
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH ASPECT RATIO SELECTIVE LATERAL ETCH USING CYCLIC PASSIVATION A...
- Publication number 20190043732
- Publication date Feb 7, 2019
- LAM RESEARCH CORPORATION
- Kwame Eason
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ULTRAHIGH SELECTIVE NITRIDE ETCH TO FORM FINFET DEVICES
- Publication number 20180269070
- Publication date Sep 20, 2018
- LAM RESEARCH CORPORATION
- Kwame Eason
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Post Etch Polymer Residue Removal
- Publication number 20120115332
- Publication date May 10, 2012
- LAM RESEARCH CORPORATION
- Seokmin Yun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of post etch polymer residue removal
- Publication number 20090211596
- Publication date Aug 27, 2009
- LAM RESEARCH CORPORATION
- Seokmin Yun
- H01 - BASIC ELECTRIC ELEMENTS