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Hsiao-Yin HSIEH
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Zhubei City, TW
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Patents Grants
last 30 patents
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Patent Grant
Arc chamber with multiple cathodes for an ion source
Patent number
9,620,326
Issue date
Apr 11, 2017
Taiwan Semiconductor Manufacturing Co., Ltd.
Chin-Tsung Lin
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Arc chamber with multiple cathodes for an ion source
Patent number
8,933,630
Issue date
Jan 13, 2015
Taiwan Semiconductor Manufacturing Co., Ltd.
Chin-Tsung Lin
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
ARC CHAMBER WITH MULTIPLE CATHODES FOR AN ION SOURCE
Publication number
20150130353
Publication date
May 14, 2015
Taiwan Semiconductor Manufacturing Co., LTD
Chin-Tsung LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ARC CHAMBER WITH MULTIPLE CATHODES FOR AN ION SOURCE
Publication number
20140167614
Publication date
Jun 19, 2014
Taiwan Semiconductor Manufacturing Co., LTD
Chin-Tsung LIN
H01 - BASIC ELECTRIC ELEMENTS