Hsieh-Ching WEI

Follow

Person

Hsinchu City, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Method of etching and cleaning wafers
- Patent number 9,583,352
- Issue date Feb 28, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chang Tsai
- G05 - CONTROLLING REGULATING
Information Patent Grant
Loading port, system for etching and cleaning wafers and method of use
- Patent number 9,136,149
- Issue date Sep 15, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chang Tsai
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF ETCHING AND CLEANING WAFERS
- Publication number 20150357198
- Publication date Dec 10, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chang TSAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOADING PORT, SYSTEM FOR ETCHING AND CLEANING WAFERS AND METHOD OF USE
- Publication number 20140141541
- Publication date May 22, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chang TSAI
- H01 - BASIC ELECTRIC ELEMENTS