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Exhaust system and process equipment
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Patent number 12,230,517
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Issue date Feb 18, 2025
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Taiwan Semiconductor Manufacturing Company, Ltd
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Hsien-Chang Hsieh
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F23 - COMBUSTION APPARATUS COMBUSTION PROCESSES
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Wet etching
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Patent number 5,989,442
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Issue date Nov 23, 1999
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Industrial Technology Research Institute
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Hsien-Fen Hsieh
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G01 - MEASURING TESTING
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Etching recipe for the CrSi film
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Patent number 5,593,601
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Issue date Jan 14, 1997
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Industrial Technology Research Institute
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Hsien-Fen Hsieh
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H01 - BASIC ELECTRIC ELEMENTS