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Hsin-Hui CHOU
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Hsinchu County, TW
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Patents Grants
last 30 patents
Information
Patent Grant
System and method for monitoring chemical mechanical polishing
Patent number
11,565,365
Issue date
Jan 31, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chih-Yu Wang
B24 - GRINDING POLISHING
Information
Patent Grant
Inspection and cleaning system and method for the same
Patent number
11,017,522
Issue date
May 25, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Chung-Pin Chou
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
System and method for monitoring operation conditions of semiconduc...
Patent number
10,872,793
Issue date
Dec 22, 2020
Taiwan Semiconductor Manufacturing Co., Ltd
Chih-Yu Wang
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
SYSTEM AND METHOD FOR MONITORING CHEMICAL MECHANICAL POLISHING
Publication number
20230182257
Publication date
Jun 15, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Yu WANG
B24 - GRINDING POLISHING
Information
Patent Application
INSPECTION SYSTEM AND METHOD
Publication number
20200334800
Publication date
Oct 22, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Chung-Pin CHOU
G06 - COMPUTING CALCULATING COUNTING