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Hsinchu, TW
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last 30 patents
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Patent Grant
Overlay measurement target
Patent number
7,379,184
Issue date
May 27, 2008
Nanometrics Incorporated
Nigel Peter Smith
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Overlay Measurement Target
Publication number
20080217794
Publication date
Sep 11, 2008
Industrial Technology Research Institute
Nigel Peter Smith
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Overlay measurement target
Publication number
20060151890
Publication date
Jul 13, 2006
Accent Optical Technologies, Inc.
Nigel Peter Smith
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY