HSIN-LUN TSENG

Person

TAOYUAN CITY, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Photomask inspection method and apparatus thereof
- Patent number 12,072,621
- Issue date Aug 27, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chih-Wei Wen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for layout enhancement based on inter-cell correl...
- Patent number 11,726,402
- Issue date Aug 15, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Wei-Lin Chu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Photomask inspection method and apparatus thereof
- Patent number 11,614,684
- Issue date Mar 28, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chih-Wei Wen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for layout enhancement based on inter-cell correl...
- Patent number 11,079,672
- Issue date Aug 3, 2021
- Taiwan Semiconductor Manufacturing Company Ltd.
- Wei-Lin Chu
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
EXTREME ULTRAVIOLET (EUV) RADIATION SOURCE APPARATUS, EUV LITHOGRAP...
- Publication number 20240369939
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- CHIEN-HSING LU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET (EUV) RADIATION SOURCE APPARATUS, EUV LITHOGRAP...
- Publication number 20240369936
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- HSIN-FU TSENG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PHOTOMASK INSPECTION METHOD AND APPARATUS THEREOF
- Publication number 20240361684
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- CHIH-WEI WEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEMS AND METHODS FOR ACTINIC MASK INSPECTION AND REVIEW IN VACUUM
- Publication number 20240003827
- Publication date Jan 4, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
- Chien-Lin Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUSES AND METHODS FOR REDUCING PARTICLE CONTAMINATION OF WAFE...
- Publication number 20240006202
- Publication date Jan 4, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
- Zheng-Hao Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EUV SOURCE STABILIZATION APPARATUS AND METHOD
- Publication number 20240004318
- Publication date Jan 4, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tzu Jeng HSU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND SYSTEM FOR LAYOUT ENHANCEMENT BASED ON INTER-CELL CORREL...
- Publication number 20230341765
- Publication date Oct 26, 2023
- Taiwan Semiconductor Manufacturing company Ltd.
- WEI-LIN CHU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PHOTOMASK INSPECTION METHOD AND APPARATUS THEREOF
- Publication number 20230213853
- Publication date Jul 6, 2023
- Taiwan Semiconductor Manufacturing company Ltd.
- CHIH-WEI WEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTOMASK INSPECTION METHOD AND APPARATUS THEREOF
- Publication number 20220075262
- Publication date Mar 10, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- CHIH-WEI WEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND SYSTEM FOR LAYOUT ENHANCEMENT BASED ON INTER-CELL CORREL...
- Publication number 20210349389
- Publication date Nov 11, 2021
- Taiwan Semiconductor Manufacturing company Ltd.
- WEI-LIN CHU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND SYSTEM FOR LAYOUT ENHANCEMENT BASED ON INTER-CELL CORREL...
- Publication number 20200133117
- Publication date Apr 30, 2020
- Taiwan Semiconductor Manufacturing company Ltd.
- WEI-LIN CHU
- G06 - COMPUTING CALCULATING COUNTING

HSIN-LUN TSENG

Person

Patents Grantslast 30 patents

Photomask inspection method and apparatus thereof

Method and system for layout enhancement based on inter-cell correl...

Photomask inspection method and apparatus thereof

Method and system for layout enhancement based on inter-cell correl...

Patents Applicationslast 30 patents

EXTREME ULTRAVIOLET (EUV) RADIATION SOURCE APPARATUS, EUV LITHOGRAP...

EXTREME ULTRAVIOLET (EUV) RADIATION SOURCE APPARATUS, EUV LITHOGRAP...

PHOTOMASK INSPECTION METHOD AND APPARATUS THEREOF

SYSTEMS AND METHODS FOR ACTINIC MASK INSPECTION AND REVIEW IN VACUUM

APPARATUSES AND METHODS FOR REDUCING PARTICLE CONTAMINATION OF WAFE...

EUV SOURCE STABILIZATION APPARATUS AND METHOD

METHOD AND SYSTEM FOR LAYOUT ENHANCEMENT BASED ON INTER-CELL CORREL...

PHOTOMASK INSPECTION METHOD AND APPARATUS THEREOF

PHOTOMASK INSPECTION METHOD AND APPARATUS THEREOF

METHOD AND SYSTEM FOR LAYOUT ENHANCEMENT BASED ON INTER-CELL CORREL...

METHOD AND SYSTEM FOR LAYOUT ENHANCEMENT BASED ON INTER-CELL CORREL...