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Hsiu Lan Pang
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Baoshan Township, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Method for designing two-dimensional array overlay targets and meth...
Patent number
8,321,821
Issue date
Nov 27, 2012
Industrial Technology Research Institute
Yi Sha Ku
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for designing two-dimensional array overlay target sets and...
Patent number
8,250,497
Issue date
Aug 21, 2012
Industrial Technology Research Institute
Wei Te Hsu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
System and method for via structure measurement
Patent number
8,139,233
Issue date
Mar 20, 2012
Industrial Technology Research Institute
Yi Sha Ku
G01 - MEASURING TESTING
Information
Patent Grant
Overlay measurement target
Patent number
7,847,939
Issue date
Dec 7, 2010
Nanometrics Incorporated
Nigel Peter Smith
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods and systems for determining overlay error based on target i...
Patent number
7,477,396
Issue date
Jan 13, 2009
Nanometrics Incorporated
Nigel Peter Smith
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
THIN METAL FILM MEASUREMENT METHOD
Publication number
20120290239
Publication date
Nov 15, 2012
Industrial Technology Research Institute
Yi-Sha Ku
G01 - MEASURING TESTING
Information
Patent Application
SYSTEM AND METHOD FOR VIA STRUCTURE MEASUREMENT
Publication number
20110172974
Publication date
Jul 14, 2011
Industrial Technology Research Institute
Yi Sha KU
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR DESIGNING TWO-DIMENSIONAL ARRAY OVERLAY TARGET SETS AND...
Publication number
20110154272
Publication date
Jun 23, 2011
Industrial Technology Research Institute
Wei Te Hsu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR DESIGNING TWO-DIMENSIONAL ARRAY OVERLAY TARGETS AND METH...
Publication number
20110131538
Publication date
Jun 2, 2011
Industrial Technology Research Institute
Yi Sha KU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Methods and systems for determining overlay error based on target i...
Publication number
20060197950
Publication date
Sep 7, 2006
Nigel Peter Smith
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY