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METHOD OF MANUFACTURING INTEGRATED CIRCUIT
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Publication number 20240201579
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Publication date Jun 20, 2024
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Hsu-Ting HUANG
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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METHOD OF MASK DATA SYNTHESIS AND MASK MAKING
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Publication number 20220373878
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Publication date Nov 24, 2022
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Hsu-Ting HUANG
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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PHOTOLITHOGRAPHY METHOD AND APPARATUS
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Publication number 20220365438
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Publication date Nov 17, 2022
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Shinn-Sheng YU
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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PHOTO MASK DATA CORRECTION METHOD
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Publication number 20220308439
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Publication date Sep 29, 2022
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Fu An TIEN
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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LITHOGRAPHY SIMULATION METHOD
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Publication number 20210357571
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Publication date Nov 18, 2021
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Fu An TIEN
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G06 - COMPUTING CALCULATING COUNTING
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PHOTO MASK DATA CORRECTION METHOD
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Publication number 20210103211
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Publication date Apr 8, 2021
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Fu An TIEN
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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LITHOGRAPHY MODEL CALIBRATION
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Publication number 20200278604
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Publication date Sep 3, 2020
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Shih-Hsiang LO
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H01 - BASIC ELECTRIC ELEMENTS
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PHOTO MASK DATA CORRECTION METHOD
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Publication number 20200133115
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Publication date Apr 30, 2020
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Fu An TIEN
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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LITHOGRAPHY SIMULATION METHOD
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Publication number 20200103764
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Publication date Apr 2, 2020
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Fu An TIEN
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G06 - COMPUTING CALCULATING COUNTING
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MASK PROCESS CORRECTION
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Publication number 20200096857
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Publication date Mar 26, 2020
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Hsu-Ting HUANG
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G06 - COMPUTING CALCULATING COUNTING
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PHOTOLITHOGRAPHY METHOD AND APPARATUS
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Publication number 20200057375
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Publication date Feb 20, 2020
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Shinn-Sheng YU
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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