Hsu Sheng Chang

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Shanghai, CN

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus to prevent contamination of optical element by...
- Patent number 7,701,549
- Issue date Apr 20, 2010
- Semiconductor Manufacturing International (Shanghai) Corporation
- Chin Yu Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus to prevent contamination of optical element by...
- Publication number 20080106708
- Publication date May 8, 2008
- Semiconductor Manufacturing International (Shanghai) Corporation
- Chin Yu Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY