Hsu Yu-Nu

Follow

Person

Pittsburgh, PA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Encapsulation of MEMS devices using pillar-supported caps
- Patent number 7,153,717
- Issue date Dec 26, 2006
- IC Mechanics Inc.
- L. Richard Carley
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Encapsulation of MEMS devices using pillar-supported caps
- Publication number 20030153116
- Publication date Aug 14, 2003
- L. Richard Carley
- B81 - MICRO-STRUCTURAL TECHNOLOGY