Hsueh Chi Shen

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Hsinchu City, TW

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Patents Grantslast 30 patents

Information Patent Grant
Advanced process control for semiconductor processing
- Patent number 8,417,362
- Issue date Apr 9, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsueh Chi Shen
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and system for thermal process control
- Patent number 7,751,908
- Issue date Jul 6, 2010
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yung-Chih Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Advanced process control for semiconductor processing
- Patent number 7,534,725
- Issue date May 19, 2009
- Taiwan Semiconductor Manufacturing Company
- Hsueh Chi Shen
- G05 - CONTROLLING REGULATING
Information Patent Grant
System and method for improving equipment communication in semicond...
- Patent number 7,437,404
- Issue date Oct 14, 2008
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsueh Chi Shen
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
System and method for real-time fault detection, classification, an...
- Patent number 6,980,873
- Issue date Dec 27, 2005
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsueh Chi Shen
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
ADVANCED PROCESS CONTROL FOR SEMICONDUCTOR PROCESSING
- Publication number 20090248187
- Publication date Oct 1, 2009
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsueh Chi Shen
- G05 - CONTROLLING REGULATING
Information Patent Application
Advanced Process Control for Semiconductor Processing
- Publication number 20080233662
- Publication date Sep 25, 2008
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsueh Chi Shen
- G05 - CONTROLLING REGULATING
Information Patent Application
PROCESS CONTROL INTEGRATION SYSTEMS AND METHODS
- Publication number 20080140590
- Publication date Jun 12, 2008
- Taiwan Semiconductor Manufacturing Co., LTD
- Hsueh-Chi Shen
- G05 - CONTROLLING REGULATING
Information Patent Application
Method and system for thermal process control
- Publication number 20060122728
- Publication date Jun 8, 2006
- Yung-Chih Chang
- G05 - CONTROLLING REGULATING
Information Patent Application
System and method for improving equipment communication in semicond...
- Publication number 20050261796
- Publication date Nov 24, 2005
- Taiwan Semiconductor Manufacturing Co., LTD
- Hsueh Chi Shen
- G05 - CONTROLLING REGULATING
Information Patent Application
SYSTEM AND METHOD FOR REAL-TIME FAULT DETECTION, CLASSIFICATION, AN...
- Publication number 20050251276
- Publication date Nov 10, 2005
- Taiwan Semiconductor Manufacturing Co., LTD
- Hsueh Chi Shen
- G05 - CONTROLLING REGULATING