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Hsin-Chu, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Method of monitoring high tilt angle of medium current implant
Patent number
6,924,215
Issue date
Aug 2, 2005
Taiwan Semiconductor Manufacturing Co., Ltd
Hung-Ta Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implant method for topographic feature corner rounding
Patent number
6,806,163
Issue date
Oct 19, 2004
Taiwan Semiconductor Manufacturing Co., Ltd
Jie-Shing Wu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Partitioned wafer boat for constant wafer backside emmissivity
Publication number
20040043617
Publication date
Mar 4, 2004
Taiwan Semiconductor Manufacturing Co., Ltd.
Wei-Ming You
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion implant method for topographic feature corner rounding
Publication number
20040005764
Publication date
Jan 8, 2004
Taiwan Semiconductor Manufacturing Co., Ltd.
Jie-Shing Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of monitoring high tilt angle of medium current implant
Publication number
20030224541
Publication date
Dec 4, 2003
Taiwan Semiconductor Manufacturing Co., Ltd.
Hung-Ta Huang
H01 - BASIC ELECTRIC ELEMENTS