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Hsin-Chu, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Source/drain carbon implant and RTA anneal, pre-SiGe deposition
Patent number
8,404,546
Issue date
Mar 26, 2013
Taiwan Semiconductor Manufacturing Company, Ltd.
Wei-Yen Woon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of enhancing dopant activation without suffering additional...
Patent number
8,273,633
Issue date
Sep 25, 2012
Taiwan Semiconductor Manufacturing Co., Ltd.
Keh-Chiang Kuo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Source/drain carbon implant and RTA anneal, pre-SiGe deposition
Patent number
7,838,887
Issue date
Nov 23, 2010
Taiwan Semiconductor Manufacturing Company, Ltd.
Wei-Yen Woon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device having ultra-shallow and highly activated sour...
Patent number
7,741,699
Issue date
Jun 22, 2010
Taiwan Semiconductor Manufacturing Company, Ltd.
Keh-Chiang Ku
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Advanced activation approach for MOS devices
Patent number
7,494,857
Issue date
Feb 24, 2009
Taiwan Semiconductor Manufacturing Company, Ltd.
Chien-Hao Chen
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Source/Drain Carbon Implant and RTA Anneal, Pre-SiGe Deposition
Publication number
20110027955
Publication date
Feb 3, 2011
Taiwan Semiconductor Manufacturing Company, Ltd.
Wei-Yen Woon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Source/Drain Carbon Implant and RTA Anneal, Pre-SiGe Deposition
Publication number
20090273034
Publication date
Nov 5, 2009
Wei-Yen Woon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF ENHANCING DOPANT ACTIVATION WITHOUT SUFFERING ADDITIONAL...
Publication number
20080242039
Publication date
Oct 2, 2008
Taiwan Semiconductor Manufacturing Co., LTD
Keh-Chiang Ku
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Advanced activation approach for MOS devices
Publication number
20080160709
Publication date
Jul 3, 2008
Chien-Hao Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Junction leakage reduction in SiGe process by tilt implantation
Publication number
20070298557
Publication date
Dec 27, 2007
Chun-Feng Nieh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ultra-shallow and highly activated source/drain extension formation...
Publication number
20070284615
Publication date
Dec 13, 2007
Keh-Chiang Ku
H01 - BASIC ELECTRIC ELEMENTS