Hu-Li Sun

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Yon-Kan City, TW

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for detecting tilt angle of a wafer platform
- Patent number 6,737,663
- Issue date May 18, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hom-Chung Lin
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Apparatus and method for detecting tilt angle of a wafer platform
- Publication number 20030218144
- Publication date Nov 27, 2003
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hom-Chung Lin
- H01 - BASIC ELECTRIC ELEMENTS