Hua Ai

Person

Mountain View, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Process integration approach of selective tungsten via fill
- Patent number 10,727,119
- Issue date Jul 28, 2020
- Applied Materials, Inc.
- He Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for thermally forming a selective cobalt layer
- Patent number 10,043,709
- Issue date Aug 7, 2018
- Applied Materials, Inc.
- Hua Ai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatuses and methods for atomic layer deposition
- Patent number 9,017,776
- Issue date Apr 28, 2015
- Applied Materials, Inc.
- Hyman W. H. Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatuses and methods for atomic layer deposition
- Patent number 8,747,556
- Issue date Jun 10, 2014
- Applied Materials, Inc.
- Hyman W. H. Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatuses and methods for atomic layer deposition
- Patent number 8,291,857
- Issue date Oct 23, 2012
- Applied Materials, Inc.
- Hyman Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatuses and methods for atomic layer deposition
- Patent number 8,293,015
- Issue date Oct 23, 2012
- Applied Materials, Inc.
- Hyman W. H. Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning of native oxide with hydrogen-containing radicals
- Patent number 7,604,708
- Issue date Oct 20, 2009
- Applied Materials, Inc.
- Bingxi Sun Wood
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PROCESS INTEGRATION APPROACH OF SELECTIVE TUNGSTEN VIA FILL
- Publication number 20190157145
- Publication date May 23, 2019
- Applied Materials, Inc.
- He REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS INTEGRATION APPROACH OF SELECTIVE TUNGSTEN VIA FILL
- Publication number 20180315650
- Publication date Nov 1, 2018
- Applied Materials, Inc.
- He REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electromigration Improvement Using Tungsten For Selective Cobalt De...
- Publication number 20180144973
- Publication date May 24, 2018
- Applied Materials, Inc.
- Weifeng Ye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR THERMALLY FORMING A SELECTIVE COBALT LAYER
- Publication number 20160133563
- Publication date May 12, 2016
- Applied Materials, Inc.
- HUA AI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Selective Deposition With Alcohol Selective Reduction And Protection
- Publication number 20160064275
- Publication date Mar 3, 2016
- Applied Materials, Inc.
- Feng Q. Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUSES AND METHODS FOR ATOMIC LAYER DEPOSITION
- Publication number 20140087091
- Publication date Mar 27, 2014
- Applied Materials, Inc.
- Hyman W.H. Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUSES AND METHODS FOR ATOMIC LAYER DEPOSITION
- Publication number 20130008984
- Publication date Jan 10, 2013
- Applied Materials, Inc.
- Hyman Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUSES AND METHODS FOR ATOMIC LAYER DEPOSITION
- Publication number 20120000422
- Publication date Jan 5, 2012
- Applied Materials, Inc.
- Hyman Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUSES AND METHODS FOR ATOMIC LAYER DEPOSITION
- Publication number 20100003406
- Publication date Jan 7, 2010
- Applied Materials, Inc.
- Hyman Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cleaning of native oxide with hydrogen-containing radicals
- Publication number 20040219789
- Publication date Nov 4, 2004
- APPLIED MATERIALS, INC.
- Bingxi Sun Wood
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Process integration approach of selective tungsten via fill

Methods for thermally forming a selective cobalt layer

Apparatuses and methods for atomic layer deposition

Apparatuses and methods for atomic layer deposition

Apparatuses and methods for atomic layer deposition

Apparatuses and methods for atomic layer deposition

Cleaning of native oxide with hydrogen-containing radicals

Patents Applicationslast 30 patents

PROCESS INTEGRATION APPROACH OF SELECTIVE TUNGSTEN VIA FILL

PROCESS INTEGRATION APPROACH OF SELECTIVE TUNGSTEN VIA FILL

Electromigration Improvement Using Tungsten For Selective Cobalt De...

METHODS FOR THERMALLY FORMING A SELECTIVE COBALT LAYER

Selective Deposition With Alcohol Selective Reduction And Protection

APPARATUSES AND METHODS FOR ATOMIC LAYER DEPOSITION

APPARATUSES AND METHODS FOR ATOMIC LAYER DEPOSITION

APPARATUSES AND METHODS FOR ATOMIC LAYER DEPOSITION

APPARATUSES AND METHODS FOR ATOMIC LAYER DEPOSITION

Cleaning of native oxide with hydrogen-containing radicals