Hua-Sheng Chiu

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Zhudong Town, TW

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Patents Grantslast 30 patents

Information Patent Grant
Leveling sensor, load port including the same, and method of leveli...
- Patent number 11,022,437
- Issue date Jun 1, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Lin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Leveling sensor, load port including the same, and method of leveli...
- Patent number 10,533,852
- Issue date Jan 14, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Lin Wang
- G01 - MEASURING TESTING
Information Patent Grant
Plasma density control
- Patent number 8,889,435
- Issue date Nov 18, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Sheng Wu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Leveling Sensor, Load Port Including the Same, and Method of Leveli...
- Publication number 20200149886
- Publication date May 14, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Lin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Density Control
- Publication number 20130084657
- Publication date Apr 4, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Sheng Wu
- H01 - BASIC ELECTRIC ELEMENTS