Huaichao MA

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Beijing, CN

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Patents Grantslast 30 patents

Information Patent Grant
Sputtering method
- Patent number 11,710,624
- Issue date Jul 25, 2023
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Bingliang Guo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Loading apparatus and physical vapor deposition apparatus
- Patent number 11,315,768
- Issue date Apr 26, 2022
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Xuewei Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and aluminum nitride film forming method for se...
- Patent number 10,643,843
- Issue date May 5, 2020
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Jun Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming film and method for forming aluminum nitride film
- Patent number 10,640,862
- Issue date May 5, 2020
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Jun Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SPUTTERING METHOD
- Publication number 20210040605
- Publication date Feb 11, 2021
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Bingliang GUO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOADING APPARATUS AND PHYSICAL VAPOR DEPOSITION APPARATUS
- Publication number 20200144035
- Publication date May 7, 2020
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Xuewei WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING FILM AND METHOD FOR FORMING ALUMINUM NITRIDE FILM
- Publication number 20180230586
- Publication date Aug 16, 2018
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Jun WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND ALUMINUM NITRIDE FILM FORMING METHOD FOR SE...
- Publication number 20170365466
- Publication date Dec 21, 2017
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Jun WANG
- C30 - CRYSTAL GROWTH