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ETCH PROFILE CONTROL OF VIA OPENING
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Publication number 20240030070
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Publication date Jan 25, 2024
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Te-Chih HSIUNG
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H01 - BASIC ELECTRIC ELEMENTS
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ETCH PROFILE CONTROL OF VIA OPENING
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Publication number 20230361185
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Publication date Nov 9, 2023
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Te-Chih HSIUNG
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H01 - BASIC ELECTRIC ELEMENTS
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Semiconductor Device and Method
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Publication number 20230352344
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Publication date Nov 2, 2023
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Ching-Feng Fu
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H01 - BASIC ELECTRIC ELEMENTS
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Semiconductor Device and Method
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Publication number 20230343648
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Publication date Oct 26, 2023
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Shao-Jyun Wu
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H01 - BASIC ELECTRIC ELEMENTS
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SEMICONDUCTOR DEVICE AND METHOD
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Publication number 20220336288
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Publication date Oct 20, 2022
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Ching-Feng Fu
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H01 - BASIC ELECTRIC ELEMENTS
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