Huan Kan

Follow

Person

Shanghai, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Simulation method of CMP process
- Patent number 10,083,266
- Issue date Sep 25, 2018
- Shanghai Huali Microelectronics Corporation
- Yun Cao
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
SIMULATION METHOD OF CMP PROCESS
- Publication number 20180032648
- Publication date Feb 1, 2018
- Yun Cao
- G06 - COMPUTING CALCULATING COUNTING