Huan-Ling LEE

Person

Hsinchu County, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Extreme ultraviolet mask with reduced wafer neighboring effect
- Patent number 12,130,548
- Issue date Oct 29, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wen-Chang Hsueh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithography mask
- Patent number 11,899,357
- Issue date Feb 13, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chien-Cheng Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacturing extreme ultraviolet mask with reduced wafer...
- Patent number 11,740,547
- Issue date Aug 29, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wen-Chang Hsueh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme ultraviolet mask with reduced wafer neighboring effect and...
- Patent number 10,996,553
- Issue date May 4, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wen-Chang Hsueh
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MASK CHARACTERIZATION METHODS AND APPARATUSES
- Publication number 20240385111
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chien-Cheng Chen
- G01 - MEASURING TESTING
Information Patent Application
FABRICATION OF NANOTUBE BUNDLES AND REACTORS FOR THE SAME
- Publication number 20240351881
- Publication date Oct 24, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Dung-Yue SU
- C01 - INORGANIC CHEMISTRY
Information Patent Application
PELLICLE AND METHOD OF MANUFACTURING THEREOF
- Publication number 20240345471
- Publication date Oct 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Pei-Cheng HSU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY MASK
- Publication number 20240134268
- Publication date Apr 25, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chien-Cheng Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PELLICLE FOR EUV LITHOGRAPHY MASKS AND METHODS OF MANUFACTURING THE...
- Publication number 20240094626
- Publication date Mar 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Pei-Cheng HSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION METHOD FOR PELLICLE MEMBRANE OF LITHOGRAPHY SYSTEM
- Publication number 20240053676
- Publication date Feb 15, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia Hao CHANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PELLICLE MEMBRANE WITH IMPROVED PROPERTIES
- Publication number 20240004284
- Publication date Jan 4, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
- Pei-Cheng Hsu
- B82 - NANO-TECHNOLOGY
Information Patent Application
PELLICLE MEMBRANE AND METHOD OF FORMING THE SAME
- Publication number 20230408904
- Publication date Dec 21, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Hao LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EXTREME ULTRAVIOLET MASK WITH REDUCED WAFER NEIGHBORING EFFECT
- Publication number 20230367194
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chang HSUEH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SIMULTANEOUS CARBON NANOTUBE GROWTH, CATALYST REMOVAL, BORON NITRID...
- Publication number 20230236496
- Publication date Jul 27, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Pei-Cheng HSU
- B82 - NANO-TECHNOLOGY
Information Patent Application
OPTICAL ASSEMBLY WITH COATING AND METHODS OF USE
- Publication number 20230161261
- Publication date May 25, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wei-Hao LEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS TO IMPROVE MECHANICAL PROPERTIES OF PELLICLE MEMBRANE
- Publication number 20230135538
- Publication date May 4, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Pei-Cheng Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR DRY PRINTING CARBON NANOTUBE MEMBRANES
- Publication number 20230026114
- Publication date Jan 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsin-Chang Lee
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHODS FOR REMOVING CATALYST PARTICLES FROM NANOTUBE FILMS
- Publication number 20220413378
- Publication date Dec 29, 2022
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
- Ping-Hsun Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY MASK AND METHODS
- Publication number 20220390827
- Publication date Dec 8, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chien-Cheng Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY MASK
- Publication number 20220365417
- Publication date Nov 17, 2022
- Taiwan Semiconductor Manfacturing Company, Ltd.
- Chien-Cheng Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MASK CHARACTERIZATION METHODS AND APPARATUSES
- Publication number 20220357660
- Publication date Nov 10, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chien-Cheng Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET MASK AND METHOD OF MANUFACTURING THE SAME
- Publication number 20210333717
- Publication date Oct 28, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wei-Che HSIEH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF MANUFACTURING EXTREME ULTRAVIOLET MASK WITH REDUCED WAFER...
- Publication number 20210247687
- Publication date Aug 12, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chang HSUEH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET MASK WITH REDUCED WAFER NEIGHBORING EFFECT AND...
- Publication number 20190146325
- Publication date May 16, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Chang HSUEH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Huan-Ling LEE

Person

Patents Grantslast 30 patents

Extreme ultraviolet mask with reduced wafer neighboring effect

Lithography mask

Method of manufacturing extreme ultraviolet mask with reduced wafer...

Extreme ultraviolet mask with reduced wafer neighboring effect and...

Patents Applicationslast 30 patents

MASK CHARACTERIZATION METHODS AND APPARATUSES

FABRICATION OF NANOTUBE BUNDLES AND REACTORS FOR THE SAME

PELLICLE AND METHOD OF MANUFACTURING THEREOF

LITHOGRAPHY MASK

PELLICLE FOR EUV LITHOGRAPHY MASKS AND METHODS OF MANUFACTURING THE...

INSPECTION METHOD FOR PELLICLE MEMBRANE OF LITHOGRAPHY SYSTEM

PELLICLE MEMBRANE WITH IMPROVED PROPERTIES

PELLICLE MEMBRANE AND METHOD OF FORMING THE SAME

EXTREME ULTRAVIOLET MASK WITH REDUCED WAFER NEIGHBORING EFFECT

SIMULTANEOUS CARBON NANOTUBE GROWTH, CATALYST REMOVAL, BORON NITRID...

OPTICAL ASSEMBLY WITH COATING AND METHODS OF USE

METHODS TO IMPROVE MECHANICAL PROPERTIES OF PELLICLE MEMBRANE

METHODS FOR DRY PRINTING CARBON NANOTUBE MEMBRANES

METHODS FOR REMOVING CATALYST PARTICLES FROM NANOTUBE FILMS

LITHOGRAPHY MASK AND METHODS

LITHOGRAPHY MASK

MASK CHARACTERIZATION METHODS AND APPARATUSES

EXTREME ULTRAVIOLET MASK AND METHOD OF MANUFACTURING THE SAME

METHOD OF MANUFACTURING EXTREME ULTRAVIOLET MASK WITH REDUCED WAFER...

EXTREME ULTRAVIOLET MASK WITH REDUCED WAFER NEIGHBORING EFFECT AND...