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Huang-Jen Hsu
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Hsinchu, TW
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Patents Grants
last 30 patents
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Patent Grant
Slurry supply system for CMP process
Patent number
8,992,287
Issue date
Mar 31, 2015
Taiwan Semiconductor Manufacturing Co., Ltd.
Sheng-Chen Wang
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
CMP SAFE ALIGNMENT MARK
Publication number
20240387398
Publication date
Nov 21, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Huang-Jen HSU
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
CMP SAFE ALIGNMENT MARK
Publication number
20220102285
Publication date
Mar 31, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Huang-Jen HSU
H01 - BASIC ELECTRIC ELEMENTS