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Hsin Chu, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for performing a polishing process in semicond...
Patent number
10,857,649
Issue date
Dec 8, 2020
Taiwan Semiconductor Manufacturing Company, Ltd.
Bo-I Lee
B24 - GRINDING POLISHING
Information
Patent Grant
Manufacture and method of making the same
Patent number
9,242,342
Issue date
Jan 26, 2016
Taiwan Semiconductor Manufacturing Company, Ltd.
Bo-I Lee
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus and method for target thickness and surface profile unifo...
Patent number
9,102,033
Issue date
Aug 11, 2015
Taiwan Semiconductor Manufacturing Company, Ltd.
Keung Hui
B24 - GRINDING POLISHING
Information
Patent Grant
Metal conductor chemical mechanical polish
Patent number
8,673,783
Issue date
Mar 18, 2014
Taiwan Semiconductor Manufacturing Company, Ltd.
Huang Soon Kang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Slurry dispenser for chemical mechanical polishing (CMP) apparatus...
Patent number
8,277,286
Issue date
Oct 2, 2012
Taiwan Semiconductor Manufacturing Co., Ltd.
Kun-Ku Hung
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
MANUFACTURE AND METHOD OF MAKING THE SAME
Publication number
20130244552
Publication date
Sep 19, 2013
Taiwan Semiconductor Manufacturing Company, Ltd.
Bo-I Lee
B24 - GRINDING POLISHING
Information
Patent Application
METHOD AND APPARATUS FOR PERFORMING A POLISHING PROCESS IN SEMICOND...
Publication number
20130078810
Publication date
Mar 28, 2013
Taiwan Semiconductor Manufacturing Company, Ltd.
Bo-I Lee
B24 - GRINDING POLISHING
Information
Patent Application
APPARATUS AND METHOD FOR TARGET THICKNESS AND SURFACE PROFILE UNIFO...
Publication number
20120129431
Publication date
May 24, 2012
Taiwan Semiconductor Manufacturing Company, Ltd.
KEUNG HUI
B24 - GRINDING POLISHING
Information
Patent Application
METAL CONDUCTOR CHEMICAL MECHANICAL POLISH
Publication number
20120001262
Publication date
Jan 5, 2012
Taiwan Semiconductor Manufacturing Company, Ltd.
Huang Soon Kang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SLURRY DISPENSER FOR CHEMICAL MECHANICAL POLISHING (CMP) APPARATUS...
Publication number
20100210189
Publication date
Aug 19, 2010
Taiwan Semiconductor Manufacturing Co., LTD
Kun-Ku Hung
B24 - GRINDING POLISHING