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Patents Grants
last 30 patents
Information
Patent Grant
3D NAND device
Patent number
10,763,275
Issue date
Sep 1, 2020
Semiconductor Manufacturing International (Shanghai) Corporation
Huayong Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Patterning method
Patent number
10,427,185
Issue date
Oct 1, 2019
Semiconductor Manufacturing International (Shanghai) Corporation
Qiang Wu
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Method for thermal treatment using heat reservoir chamber
Patent number
10,204,809
Issue date
Feb 12, 2019
Semiconductor Manufacturing International (Beijing) Corporation
Qiang Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photoresist coating apparatus and methods
Patent number
10,105,722
Issue date
Oct 23, 2018
Semiconductor Manufacturing International (Shanghai) Corporation
Yang Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
3D NAND device and fabrication method thereof
Patent number
9,711,529
Issue date
Jul 18, 2017
Semiconductor Manufacturing International (Shanghai) Corporation
Huayong Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photoresist with top-coating photo-decomposable base for photolitho...
Patent number
9,645,499
Issue date
May 9, 2017
Semiconductor Manufacturing International (Shanghai) Corporation
Huayong Hu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Semiconductor structure and fabrication method thereof
Patent number
9,640,446
Issue date
May 2, 2017
Semiconductor Manufacturing International (Shanghai) Corporation
Huayong Hu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus, photolithographical reticles and exposure metho...
Patent number
9,606,451
Issue date
Mar 28, 2017
Semiconductor Manufacturing International Corporation
Qiang Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Heat reservoir chamber, and method for thermal treatment
Patent number
9,576,828
Issue date
Feb 21, 2017
Semiconductor Manufacturing International (Beijing) Corporation
Qiang Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Patterning apparatus and patterning methods thereof
Patent number
9,547,236
Issue date
Jan 17, 2017
Semiconductor Manufacturing International (Shanghai) Corporation
Qiang Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and exposure method thereof
Patent number
9,298,099
Issue date
Mar 29, 2016
Semiconductor Manufacturing International (Shanghai) Corporation
Qiang Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask, manufacturing method thereof and mask haze monitoring method
Patent number
8,563,201
Issue date
Oct 22, 2013
Semiconductor Manufacturing International (Beijing) Corporation
Huayong Hu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
3D NAND DEVICE
Publication number
20170278864
Publication date
Sep 28, 2017
Semiconductor Manufacturing International (Shanghai) Corporation
HUAYONG HU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR THERMAL TREATMENT USING HEAT RESERVOIR CHAMBER
Publication number
20170133251
Publication date
May 11, 2017
Semiconductor Manufacturing International (Beijing) Corporation
QIANG WU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PATTERNING METHOD
Publication number
20170080456
Publication date
Mar 23, 2017
Semiconductor Manufacturing International (Shanghai) Corporation
QIANG WU
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
3D NAND DEVICE AND FABRICATION METHOD THEREOF
Publication number
20160329345
Publication date
Nov 10, 2016
Semiconductor Manufacturing International (Shanghai) Corporation
HUAYONG HU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND FABRICATION METHOD THEREOF
Publication number
20160163605
Publication date
Jun 9, 2016
Semiconductor Manufacturing International (Shanghai) Corporation
HUAYONG HU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTORESIST WITH TOP-COATING PHOTO-DECOMPOSABLE BASE FOR PHOTOLITHO...
Publication number
20160062241
Publication date
Mar 3, 2016
Semiconductor Manufacturing International (Shanghai) Corporation
HUAYONG HU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HEAT RESERVOIR CHAMBER, AND METHOD FOR THERMAL TREATMENT
Publication number
20160027670
Publication date
Jan 28, 2016
Semiconductor Manufacturing International (Shanghai) Corporation
QIANG WU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PATTERNING APPARATUS AND PATTERNING METHODS THEREOF
Publication number
20150205209
Publication date
Jul 23, 2015
Semiconductor Manufacturing International (Shanghai) Corporation
QIANG WU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, PHOTOLITHOGRAPHICAL RETICLES AND EXPOSURE METHO...
Publication number
20150205215
Publication date
Jul 23, 2015
Semiconductor Manufacturing International (Shanghai) Corporation
QIANG WU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTORESIST COATING APPARATUS AND METHODS
Publication number
20140363565
Publication date
Dec 11, 2014
Semiconductor Manufacturing International (Shanghai) Corporation
YANG LIU
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
EXPOSURE APPARATUS AND EXPOSURE METHOD THEREOF
Publication number
20140253896
Publication date
Sep 11, 2014
Semiconductor Manufacturing International (Shanghai) Corporation
QIANG WU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MASK, MANUFACTURING METHOD THEREOF AND MASK HAZE MONITORING METHOD
Publication number
20130108948
Publication date
May 2, 2013
Semiconductor Manufacturing International (Beijing) Corporation
HUAYONG HU
H01 - BASIC ELECTRIC ELEMENTS