Hubert A. M. Neilen

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Veldhoven, NL

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Patents Grantslast 30 patents

Information Patent Grant
Positioning device comprising a z-manipulator and a .theta.-manipul...
- Patent number 4,746,800
- Issue date May 24, 1988
- ASM Lithography B.V.
- Jan Van Eijk
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR