Hubert Adriaan van Mierlo

Person

Maassluis, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma generator and method for cleaning an object
- Patent number 8,961,694
- Issue date Feb 24, 2015
- Nederlandse Organisatie voor Toegepast-Natuurwetenschappelijk Onderzoek TNO
- Fokko Pieter Wieringa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic apparatus and method of manufacturing an electrostatic...
- Patent number 8,476,167
- Issue date Jul 2, 2013
- ASML Netherlands B.V.
- Hubert Adriaan Van Mierlo
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Optical element for radiation in the EUV and/or soft X-ray region a...
- Patent number 8,164,077
- Issue date Apr 24, 2012
- Carl Zeiss SMT GmbH
- Marco Wedowski
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Alignment marker and lithographic apparatus and device manufacturin...
- Patent number 7,781,237
- Issue date Aug 24, 2010
- ASML Netherlands B.V.
- Gert-Jan Heerens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method
- Patent number 7,522,263
- Issue date Apr 21, 2009
- ASML Netherlands B.V.
- Hubert Adriaan Van Mierlo
- G01 - MEASURING TESTING
Information Patent Grant
Lithographic apparatus for imaging a front side or a back side of a...
- Patent number 7,480,028
- Issue date Jan 20, 2009
- ASML Netherlands B.V.
- Michael Van Der Veen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position determination method and lithographic apparatus
- Patent number 7,177,009
- Issue date Feb 13, 2007
- ASML Netherlands B.V.
- Jacob Frederik Friso Klinkhamer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Lithographic Apparatus and Method of Manufacturing an Electrostatic...
- Publication number 20110126406
- Publication date Jun 2, 2011
- ASML NETHERLANDS B.V.
- Hubert Adriaan VAN MIERLO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PLASMA GENERATOR AND METHOD FOR CLEANING AN OBJECT
- Publication number 20100059085
- Publication date Mar 11, 2010
- NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETEN
- Fokko Pieter Wieringa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Lithographic apparatus and method
- Publication number 20070146658
- Publication date Jun 28, 2007
- ASML NETHERLANDS B.V.
- Hubert Adriaan Van Mierlo
- G01 - MEASURING TESTING
Information Patent Application
Lithographic apparatus and method of manufacturing an electrostatic...
- Publication number 20070139855
- Publication date Jun 21, 2007
- ASML NETHERLANDS B.V.
- Hubert Adriaan Van Mierlo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Position determination method and a lithographic apparatus
- Publication number 20060072087
- Publication date Apr 6, 2006
- ASML NETHERLANDS B.V.
- Jacob Frederik Friso Klinkhamer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Alignment marker and lithographic apparatus and device manufacturin...
- Publication number 20060007442
- Publication date Jan 12, 2006
- ASML NETHERLANDS B.V.
- Gert-Jan Heerens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Alignment marker and lithographic apparatus and device manufacturin...
- Publication number 20050275841
- Publication date Dec 15, 2005
- ASML NETHERLANDS B.V.
- Gert-Jan Heerens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Hubert Adriaan van Mierlo

Person

Patents Grantslast 30 patents

Plasma generator and method for cleaning an object

Lithographic apparatus and method of manufacturing an electrostatic...

Optical element for radiation in the EUV and/or soft X-ray region a...

Alignment marker and lithographic apparatus and device manufacturin...

Lithographic apparatus and method

Lithographic apparatus for imaging a front side or a back side of a...

Position determination method and lithographic apparatus

Patents Applicationslast 30 patents

Lithographic Apparatus and Method of Manufacturing an Electrostatic...

PLASMA GENERATOR AND METHOD FOR CLEANING AN OBJECT

Lithographic apparatus and method

Lithographic apparatus and method of manufacturing an electrostatic...

Position determination method and a lithographic apparatus

Alignment marker and lithographic apparatus and device manufacturin...

Alignment marker and lithographic apparatus and device manufacturin...