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Hubert Matthieu Richard Steijns
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Veldhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Substrate support and lithographic process
Patent number
7,791,709
Issue date
Sep 7, 2010
ASML Netherlands B.V.
Pieter Renaat Maria Hennus
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20080137055
Publication date
Jun 12, 2008
ASML NETHERLANDS B.V.
Pieter Renaat Maria Hennus
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY