Hubertus A. Corsius

Follow

Person

Nieuwegein, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for depositing a layer on a substrate
- Patent number 5,294,572
- Issue date Mar 15, 1994
- ASM International N.V.
- Ernst H. A. Granneman
- H01 - BASIC ELECTRIC ELEMENTS