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Hubertus Antonius GERAETS
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Arendonk, BE
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Patents Grants
last 30 patents
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Patent Grant
Lithographic apparatus and method
Patent number
9,519,224
Issue date
Dec 13, 2016
ASML Netherlands B.V.
Arjan Gijsbertsen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Calibration method and inspection apparatus
Patent number
8,908,148
Issue date
Dec 9, 2014
ASML Netherlands B.V.
Hubertus Antonius Geraets
G01 - MEASURING TESTING
Information
Patent Grant
Method of measuring focus of a lithographic projection apparatus
Patent number
8,436,998
Issue date
May 7, 2013
ASML Netherlands B.V.
Gerardus Carolus Johannus Hofmans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of measuring focus of a lithographic projection apparatus
Patent number
8,289,516
Issue date
Oct 16, 2012
ASML Netherlands B.V.
Gerardus Carolus Johannus Hofmans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Lithographic Apparatus and Method
Publication number
20140313496
Publication date
Oct 23, 2014
ASML NETHERLANDS B.V.
Arjan Gijsbertsen
G01 - MEASURING TESTING
Information
Patent Application
METHOD OF MEASURING FOCUS OF A LITHOGRAPHIC PROJECTION APPARATUS
Publication number
20130003031
Publication date
Jan 3, 2013
ASML NETHERLANDS B.V.
Gerardus Carolus Johannus HOFMANS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Calibration Method and Inspection Apparatus
Publication number
20120013875
Publication date
Jan 19, 2012
ASML NETHERLANDS B.V.
Hubertus Antonius GERAETS
G01 - MEASURING TESTING
Information
Patent Application
METHOD OF MEASURING FOCUS OF A LITHOGRAPHIC PROJECTION APPARATUS
Publication number
20090135389
Publication date
May 28, 2009
ASML NETHERLANDS B.V.
Gerardus Carolus Johannus HOFMANS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY