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Hubertus Johannes Gertrudus Simons
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DH Venlo, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Inspection method and apparatus and lithographic processing cell
Patent number
RE49460
Issue date
Mar 14, 2023
ASML Netherlands B.V.
Everhardus Cornelis Mos
Information
Patent Grant
Inspection method and apparatus and lithographic processing cell
Patent number
RE49199
Issue date
Sep 6, 2022
ASML Netherlands B.V.
Everhardus Cornelis Mos
Information
Patent Grant
Method and apparatus for inspection and metrology
Patent number
11,170,072
Issue date
Nov 9, 2021
ASML Netherands B.V.
Everhardus Cornelis Mos
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Device manufacturing method
Patent number
11,061,336
Issue date
Jul 13, 2021
ASML Netherlands B.V.
Hubertus Johannes Gertrudus Simons
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Inspection method and apparatus, and lithographic apparatus
Patent number
9,927,717
Issue date
Mar 27, 2018
ASML Netherlands B.V.
Kyu Kab Rhe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of applying a pattern to a substrate, device manufacturing m...
Patent number
9,291,916
Issue date
Mar 22, 2016
ASML Netherlands B.V.
Stefan Cornelis Theodorus Van Der Sanden
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment mark deformation estimating method, substrate position pr...
Patent number
8,982,347
Issue date
Mar 17, 2015
ASML Netherlands B.V.
Xiuhong Wei
G01 - MEASURING TESTING
Information
Patent Grant
Method of applying a pattern to a substrate, device manufacturing m...
Patent number
8,976,355
Issue date
Mar 10, 2015
ASML Netherlands B.V.
Stefan Cornelis Theodorus Van Der Sanden
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Inspection method and apparatus and lithographic processing cell
Patent number
8,887,107
Issue date
Nov 11, 2014
ASML Netherlands B.V.
Everhardus Cornelis Mos
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Alignment system, lithographic system and method
Patent number
8,706,442
Issue date
Apr 22, 2014
ASML Netherlands B.V.
Everhardus Cornelis Mos
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for selecting sample positions on a substrate, method for pr...
Patent number
8,504,333
Issue date
Aug 6, 2013
ASML Netherlands B.V.
Everhardus Cornelis Mos
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND APPARATUS FOR INSPECTION AND METROLOGY
Publication number
20220027437
Publication date
Jan 27, 2022
ASML NETHERLANDS B.V.
Everhardus Cornelis MOS
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
DEVICE MANUFACTURING METHOD
Publication number
20200081353
Publication date
Mar 12, 2020
ASML NETHERLANDS B.V.
Hubertus Johannes Gertrudus SIMONS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS FOR INSPECTION AND METROLOGY
Publication number
20180067900
Publication date
Mar 8, 2018
ASML NETHERLANDS B.V.
Everhardus Cornelis MOS
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
INSPECTION METHOD AND APPARATUS, AND LITHOGRAPHIC APPARATUS
Publication number
20160327870
Publication date
Nov 10, 2016
ASML NETHERLANDS B.V.
Kyu Kab RHE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of Applying a Pattern to a Substrate, Device Manufacturing M...
Publication number
20150153656
Publication date
Jun 4, 2015
ASML NETHERLANDS B.V.
Stefan Cornelis Theodorus VAN DER SANDEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Inspection Method and Apparatus and Lithographic Processing Cell
Publication number
20140089870
Publication date
Mar 27, 2014
ASML NETHERLANDS B.V.
Everhardus Cornelis MOS
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method of Applying a Pattern to a Substrate, Device Manufacturing M...
Publication number
20130230797
Publication date
Sep 5, 2013
ASML NETHERLANDS B.V.
Stefan Cornelis Theodorus VAN DER SANDEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Alignment Mark Deformation Estimating Method, Substrate Position Pr...
Publication number
20130141723
Publication date
Jun 6, 2013
ASML Netherlands N.V.
Xiuhong WEI
G01 - MEASURING TESTING
Information
Patent Application
Alignment systems and methods for lithographic systems
Publication number
20060081792
Publication date
Apr 20, 2006
ASML NETHERLANDS B.V.
Franciscus Bernardus Maria Van Bilsen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Alignment system and method and device manufactured thereby
Publication number
20050254030
Publication date
Nov 17, 2005
ASML NETHERLANDS B.V.
Hoite Pieter Theodoor Tolsma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Alignment systems and methods for lithographic systems
Publication number
20050189502
Publication date
Sep 1, 2005
ASML NETHERLANDS B.V.
Franciscus Bernardus Maria Van Bilsen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY