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Hubertus Johannes Gertrudus Simons
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Venlo, NL
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last 30 patents
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Patent Application
Alignment systems and methods for lithographic systems
Publication number
20070176128
Publication date
Aug 2, 2007
ASML NETHERLANDS B.V.
Franciscus Bernardus Maria Van Bilsen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of selecting a grid model for correcting a process recipe fo...
Publication number
20070021860
Publication date
Jan 25, 2007
ASML NETHERLANDS B.V.
Hubertus Johannes Gertrudus Simons
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Alignment systems and methods for lithographic systems
Publication number
20060086910
Publication date
Apr 27, 2006
ASML NETHERLANDS B.V.
Franciscus Bernardus Maria Van Bilsen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Alignment systems and methods for lithographic systems
Publication number
20060081791
Publication date
Apr 20, 2006
ASML NETHERLANDS B.V.
Franciscus Bernardus Maria Van Bilsen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Alignment systems and methods for lithographic systems
Publication number
20060081790
Publication date
Apr 20, 2006
ASML NETHERLANDS B.V.
Franciscus Bernardus Maria Van Bilsen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060012763
Publication date
Jan 19, 2006
ASML Netherlands B.V.
Paul Christiaan Hinnen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060012779
Publication date
Jan 19, 2006
ASML NETHERLANDS B.V.
Paul Christiaan Hinnen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY